He-Ne拍波激光干涉仪的研究
Research of the He-Ne laser beat-wave interferometer
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摘要: 介绍了一种可对大尺寸工件进行无导轨精密测量的方法和装置。装置以双纵模热稳频HeNe激光器为光源。理论及实验均证明该光源的频差有较高的稳定度(室外不低于1×10-7)和强的抗干扰性,拍波频率约为750MHz,拍波长约为400mm。该装置以拍波合成的场强信号的节点为对准标志,以光路组合形成的双频激光干涉仪测量尾数部分。实验表明,该装置的节点定位精度小于0.05mm,尾数测量部分分辨率为0.08μm,整个测量系统可在20m范围内进行精度为±50μm+1.5×10-6·L(L为被测长度,单位为m)的测量。Abstract: A precision measuring method and device for large size work-piece is presented in the paper.The frequency-stabilized double longitudinal modes He-Ne laser with thermoregulation is used as light source,which has high stability of frequency difference(less than 1×10-7 in the open air) and good anti-disturbance performance that has been proved by theory and experiments.Its beat frequency is about 750MHz and beat wavelength 400mm.The node is used as sampling flag and the beat-wave fringe fraction is measured with double frequency interferometer combined by optical components.The experiments indicate that the accuracy of determining nodes is less than 0.05mm,the resolution for measuring fringe fraction is 0.08μm,the accuracy of the device is ±50μm+1.5×10-6·L(L is the measured distance,unit m)in the range of 20m length.
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