灰度掩模制作系统掩模图形的生成及工艺研究

Manufacturing system for gray-scale masks’ mask patterns’ making and technique study

摘要: 灰度掩模法是目前正在积极探索的一种二元光学器件制作方法。从基于空间光调制器的灰度掩模制作方法出发,就“掩模图形的生成”和“工艺”这两个难点问题进行了深入的研究,并具体地制作了几种常用的二元光学器件的灰度掩模,为该方法进一步投入实用提供了一条较好的思路。

Abstract: Gray-scale mask method is an active groping facture idea of binary optics at present.For more utility,some difficult questions such as mask patterns' making and technique are being studied in-depth based on the manufacturing method for gray-scale masks using special light modulator.At the same time,some gray-scale masks of normal binary optical elements have been actually fabricated.