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以无衍射光为基准的内孔同轴度测量仪

A coaxial measuring system for a hole using non-diffracting beam

  • 摘要: 沿着z轴方向传播的无衍射光决定了一条空间直线。加之无衍射光束的光轴比准直激光束稳定,适于作空间直线度/同轴度误差测量的直线基准。以无衍射光为基准,结合圆度测量及其修正技术,实现了一种内孔同轴度的高精度测量技术。介绍了内孔同轴度测量技术的工作原理,并从误差的理论分析和试验来作了证明。

     

    Abstract: Using the non-diffracting beam along the axes z,a spatial straight line can be reasonably obtained.Furthermore,the non-diffracting beam has better tolerance properties to the drift of laser beam than that of the common collimated laser beam and its optic axes is more stable than the enlarged laser beam.So it is more suitable to be used as the spatial datum-line for straightness error or coaxiality error measurement.Based on the non-diffracting beam datum-line and combining roundness measuring technology with its amending technology,a high precision coaxial measurement method for a hole has been proposed in this paper.The principle of the measuring system is introduced and theoretical error analysis and test are made to verify it.

     

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