反射激光式超声测厚传感器及其应用

基金项目:

国家自然科学基金;江苏省自然科学基金;教育部高校优秀青年教师奖励计划;激光技术国家重点实验室开放基金资助项目

详细信息

Reflected laser ultrasonic sensor for testing thickness and its application

Department of Applied Physics, Nanjing University of Science & Technology, Nanjing, 210094

摘要: 研制了激光超声测厚传感器,并对其测试原理进行了讨论.该传感器具有高频响、频带宽、较高的灵敏度且易于调节.进而采用该传感器测试了由脉冲Nd:YAG激光在抛光的薄铁片上所激发的超声纵波.根据铁片背面对心处接收到的超声纵波及其回波波形,可以推算出样品薄板的厚度.理论和实验测试结果显示,该传感器的相对测量误差达0.5%.
- 激光超声 /
- 光偏转 /
- 测厚传感器 /
- 纵波
Abstract: A new laser ultrasonic sensor for testing samples' thickness is developed.The detection principle is discussed in detail.This sensor has high-frequency response,high sensitivity and is easy to adjust.The sensor is used to detect laser-induced ultrasonic longitude-wave at the epicenter of the rear metallic surface when pulse Nd:YAG laser is focused on polished iron plate.Well-defined longitude-wave and its echo waves are acquired.Based on the experimental results,the sample's thickness can be deduced.The theoretical and experimental results are in good agreement with relative error of 0.5%.
- laser ultrasound /
- optical beam deflection /
- senor for testing thickness /
- longitudinal wave

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