薄膜均匀性的有限元算法
Simulating uniformity of film thickness with finite-elements method
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摘要: 应用有限元方法模拟计算了镀膜系统平行平面转盘在不同转速以及不同的镀膜时间下波分复用(DWDM)系统介质滤光片的成膜均匀性。结果表明,针对不同的膜料,合理选择转速和控制镀膜时间能够提高薄膜成膜的均匀性。Abstract: In this paper,finite-elements method is used to simulate the film thickness uniformity at different rotation and different time. The result shows that the uniformity of film thickness can be improved if the rotation and time are selected properly.
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