定向棱镜腔平顶高斯激光束特性的研究
Properties of flattened Gaussian beam in directional prism cavity
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摘要: 在XeCl准分子激光器中,采用定向棱镜作为端反射镜与平面输出镜构成激光器谐振腔,获得了近场能量分布均匀、远场能量分布高度集中的相干平顶高斯激光束输出,并具有腔镜高抗失调能力,改善了激光束质量。Abstract: A coherent flattened Gaussian beam has been obtained in the XeCl excimer laser with directional prism.The beam is well distributed in the near field and highly focused in the far field.Immunity to misalignment of excimer laser increases.
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