准分子激光刻蚀聚合物微图形制作研究
Micropatterns on polymers etched by excimer lasers
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摘要: 主要描述了紫外准分子激光刻蚀聚酰亚胺(polyimide,PI)制作微图案实验。通过这种刻蚀方法,成功地在PI上制作了微米量级线宽和亚微米量级深度的图案。Abstract: In the paper,the experiment with UV excimer laser etching PI for micropatterns is described in detail.With this method,micropatterns with micron scale line width and sub micron depth have been successfully fabricated on PI.
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