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全息相移技术用于物体的三维面形测量

Holographic phase shifting technique for 3D profilometry

  • 摘要: 提出将全息干涉条纹和相移技术用于三维面形测量,首先利用相移进行位相解调,得到各点的包裹相位分布,再利用投影条纹最小二乘法得到的高度信息对位相进行去包裹处理,从而得到具有较高精度的位相测量和相应的三维面形测量结果.

     

    Abstract: Based on holographic technique,the principle and experimental device for 3D profile measurement are introduced in the papaer.The holographic interference fringe is used instead of projected fringe.Meanwhile,phase shifting technique is used to calculate the phase of the fringe and the wrapped phase distribution of the holographic fringe is produced.Then the unwrapping process will be made by means of the height obtained based on the least square of the projected fringe.Thus,phase measurement can be obtained with higher precision.Finally,the 3D shape data can be produced according to geometric relationship between phase and the object height.

     

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