Research of laser scanning phase edge measurement
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摘要: 在激光扫描检测技术中,被测件边缘信号的检测精度将直接影响到系统测量的精度.讨论了一种新的边缘检测方法,即对扫描激光束进行调制,并利用调制信号的相位突变提取边缘信号.采用该方法可使工件边缘的检测精度小于微米量级.Abstract: The system precision is directly affected by the sample edge measurement precision in laser scanning measuring technology.A new method is proposed to detect the edge through modulating scanning laser beam and picking up the phase reversal of the detection signal as the edge signal.Based on the method,the edge measurement precision can be improved less than one micron.
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Keywords:
- laser scanning /
- phase /
- edge measurement
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