同轴射频激励CO2激光器的热效应研究
Study on thermal effect of a coaxial RF-excited CO2 laser
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摘要: 通过求解放电等离子体中的带电粒子密度和能量的平衡方程、电流连续性方程以及热传导方程,研究了同轴射频(RF)激励CO2激光器中放电混合气体的温度效应,分析了有关放电参数对温度分布的影响。Abstract: This paper describes the thermal effects of a coaxial RF-excited CO2 laser,based on the balance equations of electron density and energy,current continuity equation,and heat conduction equationDependencies of the spatial distributions of gas temperature on some discharge parameters are discussed.
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