He-Ne激光器功率调谐位移传感激光器
Displacement sensing He-Ne laser based on intensity tuning with λ/8 accuracy and self-calibration
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摘要: 阐述了一种新型的HeNe激光位移传感器,具有自校准功能以及没有原理上的误差。利用频率分裂技术,将一个纵模间隔分为4个宽度相等的区间,在这4个区间内激光器具有不同的光功率输出。当一个频率移动过这样的一个区间,相当于激光器的一个腔镜移动了λ/8。可移动的反射镜与被测工件相连。这样,一支HeNe激光器变成了一个不用干涉现象的位移传感器,其测量范围可达10mm,测量精度可达0.079μm,并具有判向的功能。Abstract: The principle is presented and demonstrated of using a single He-Ne laser to sense displacement without nonlinear error in principle,and with function of self-calibration. By using frequency-splitting technology,we could separate a mode interval into four equal-width ranges with different intensity characteristics. One cavity mirror of the laser moves λ/8 along the laser axis when a laser frequency crosses one such range. The moving mirror contacts with and is moved by the object to be measured. Thus the He-Ne laser becomes a displacement sensor without using interference phenomenon which works with accuracy of 0.079μm,10mm measuring range,and function of distinguishing direction.
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