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位置指示光源对PSD定位精度影响的实验研究

Experimental study of the effect of light source on position precision of PSD

  • 摘要: 简单介绍了PSD在国内外发展和研制动态,并就位置指示光源对PSD定位精度的影响进行了实验研究。实验证明:在位置测量时,指示光源强度波动对PSD定位精度并非像一般理论所认为的那样没有影响,而只是在特定范围内没有影响或影响甚微。同时,实验还表明,光源的光斑大小、形状对位置精度也有一定的影响。

     

    Abstract: In this paper,the development of PSD in land and abroad are briefly introduced,and some experiments for the study of the effects of the light source on the position precision of PSD are performed as well.It is proved that the fluctuation of the light intensity can lead to the loss of the position precision of PSD,the results are far from those derived from theoretical analysis:there is no effect of light intensity on the position precision.At the same time,the experiments also show that the size and shape of the light speckle can also exert certain effects on the ultimate position precision.

     

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