Abstract: This paper compared several methods of making the photoresist embossing holographic master and gave out the evaluation.The one-step imaging process provide the functions of the better effect and simple process,but the method needs huge investment.For one-step direct method,it is essential to have a two dimension pattern plate with high resolution,high contrast and low noise.Otherwise than one-step imaging process,the one-step direct method needn't high quality equipments,so the investmen is lower.The one-step projection method can not provide better effect and is seriously restricted by the operating condition,so the method is used only when others can not be used.Owing to the aberration of master and lower utilization ratio of light energy,the two-step method is used only as an auxi liary means of one-step direct method.