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Ar+激光器用于电阻微调的研究

Utilization of Ar+ laser for resistance trimming

  • 摘要: 本文讨论并研究了Ar+激光器用于电阻微调的优越性。结果表明,在比常用的Nd:YAG激光功率小得多的情况下,可得到与之相当的刻线宽度和阻值稳定性。

     

    Abstract: The resistance trimming often use a CO2 laser or Nd:YAG laser as a light source.And the Ar+ laser has shorter wavelength than Nd:YAG and CO2 laser.The reflection index of melt film is smaller for 514.5nm wavelength and it is easy to build a better optical system to provide precise resistance trimming.This paper described the trimming system and summarized much practical data.

     

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