Ar+激光器用于电阻微调的研究

详细信息

Utilization of Ar+ laser for resistance trimming

摘要: 本文讨论并研究了Ar+激光器用于电阻微调的优越性。结果表明,在比常用的Nd:YAG激光功率小得多的情况下,可得到与之相当的刻线宽度和阻值稳定性。
- Ar~＋激光器 /
- 电阻微调
Abstract: The resistance trimming often use a CO2 laser or Nd:YAG laser as a light source.And the Ar+ laser has shorter wavelength than Nd:YAG and CO2 laser.The reflection index of melt film is smaller for 514.5nm wavelength and it is easy to build a better optical system to provide precise resistance trimming.This paper described the trimming system and summarized much practical data.
- Ar+ laser /
- resistance trimming

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