带磁开关的冲击-自持脉冲放电技术及其应用

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详细信息

Magnetic-spiker-sustainer excitation technology and uses in excimer laser

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摘要

摘要: 本文通过对带磁开关的冲击-自持脉冲放电电路放电过程的分析,指出了该电路在激发准分子激光时的优点,在考虑准分子激光形成过程特点的基础上,进一步指出了利用该电路有利于制成高效率、高功率、长脉冲准分子激光器件.
- 磁开关冲击-自持脉冲 /
- 准分子激光
Abstract: Based on the analysis of operating principles of magnetic-spiker-sustainer excitation used in excimer laser,this paper points out the technique is suitable to provide the laser pulses with the high efficiency,high average power and long duration.Experiment results show that the using the technique can generate the 170ns KrF laser pulses and 1μm XeCl laser pulses.
- magnetic-spiker-sustainer /
- excimer laser

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