电调频半导体激光绝对测量干涉仪
A interferometer for absolute distance measurement using diode laser with current induced frequency modulation
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摘要: 分析了电调频半导体激光干涉仪的长度绝对测量原理,介绍了干涉仪的基本结构。实验结果表明,该干涉仪的绝对测量范围为0.3～1.5m,测量误差为0.1～0.3mm。Abstract: The principle of absolute distance measurement using a diode laser with current-induced frequency modulation is presented. The configuration of the interferometer is described. The experimental results show that the measurable range of the interferometer is 0.3 to 1.5 meter with accuracy of 0.1 to 0.3mm.
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