X光预电离源实验研究

详细信息

Experimental research of X-ray preionization source for excimer lasers

摘要: 对于准分子激光器这样的高压气体脉冲放电器件,为保证放电的均匀性,预电离是必不可少的。本文介绍了X光预电离的产生机理及实验装置,并进行了详细的实验研究及理论分析,对实际工作有较大的参考意义。
- 高压气体脉冲放电 /
- X光预电离 /
- 初始电子浓度
Abstract: In order to obtain the homogeneity of pulse discharge at the high pressure,a X-ray preionization source for excimer lasers is introduced in this paper.The X-ray results from the impact of accelerated electrons against a Tatarget.The shorter the wavelength of X-ray is,the ability of the preionization is much stronger.With the X-ray preionization source,the preionization electrons density of 2.9×108cm-3 can be obtained in He:Xe:Fe mixed gas atmosphere.
- pulse discharge at high pressure /
- X-ray preionization /
- initial electron density

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