用准分子激光CVD制作SnO2微透镜及其阵列的技术研究

详细信息

Study on the fabrication technology of SnO2 microlens and its array by using excimer laser-CVD technique

Dept. of Electronic & Engineering, Jilin University, Jilin Univ.Division of integrated Optoelectronics Union Lab

摘要: 本文利用准分子激光CVD技术以液态SnCl4和氧气为源制出了半径45μm的SnO2薄膜微透镜及微透镜阵列。并从反应机制和生长规律出发对这一生长技术特点和前景进行了阐述。
- 准分子激光CVD /
- 微透镜 /
- 微透镜阵列
Abstract: Here we fabricate a microlens with 45μm radius and its array with liquid SnCl4 and oxygen as the sources by using excimer laser CVD technique. Acording to its growing mechanism and growing law,we also show the characteristics and the prospects of this technology.
- excimer laser-CVD /
- microlens /
- microlens array

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