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补偿式光纤双法布里-珀罗微位移测量系统

Compensated optical fibre double Fabry-Perot system for measuring micro-displacement

  • 摘要: 本文提出一种能补偿环境影响的,插入光纤传光介质的新型微位移测量系统和灵敏度阈的实验结果.由于采用平行双通道的结构,系统具有高精度、抗干扰的补偿法特点.该系统适合于微位移(纳米级)测量,可用于检定其它高精度位移传感器,几何量计量中定位,微细加工表面轮廓测量以及可以转换成微位移量或光程差的其它物理量测量中.

     

    Abstract: A new double Fabry-Perot interferometer system with optical fibre for measuring micro-displacement and experiment study about its sensitivity threshold has been introduced in this paper.This system has the characteristics of high accuracy,interference-free compensation due to parallel double-channel configuration.Meanwhile the system may be suitable for accurate measurement of micro-displacement,such as calibration of displacement sensors,location in geometrical metrology,and for measurement of topography of fine manufactured surfaces and other physical quantities which could be transferred into displacement or optical path difference.

     

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