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天文望远镜增强银保偏反射镜的设计与制备

Design and preparation of enhanced silver polarization-maintaining mirrors for astronomical telescopes

  • 摘要: 为了满足高性能激光通信终端的光学系统对高性能反射镜的需求,制备了一种增强型银反射膜。运用等效层设计理论,采用“金属+多层介质膜”的膜系结构,选用银Ag金属和TiO2、SiO2介质膜层材料,在入射角为45°时,对目标波长808 nm和1550 nm波段处确保膜层满足高反射率的同时实现对偏振光相位的调控;并采用电子束蒸发离子辅助沉积方式配合石英晶体振荡和高精度光学膜厚监控系统监控膜层厚度和沉积速率,制备了增强型银反射膜样品。结果表明,在808 nm和1550 nm波段处,s偏振光的反射率大于97.50%,p偏振光的反射率大于98.95%,s光与p光相位差小于1°;该增强型银反射膜通过了一系列环境检测实验,满足可靠性要求。所设计的天文望远镜增强型银反射膜对高性能激光通信终端的光学系统研制有一定帮助作用。

     

    Abstract:
    To meet the requirements for high-performance mirrors in the optical system of laser communication terminal, it is essential to ensure that the film achieves a high reflectivity of > 99% at the target wavelengths of 808 nm and 1550 nm, while also modulating the phase of polarized light, so that the phase difference between s- and p-polarized light remains below 1°. This study aims to overcome the limitations of insufficient phase accuracy in traditional metallic mirrors, develop an enhanced silver-based polarization-maintaining mirror, and verify its reliability in space environments. The designed enhanced silver reflective film for the astronomical telescope plays a crucial role in the optical system development of laser communication terminal.
    Using the equivalent-layer design theory, a film structure of “metal + aperiodic multilayer dielectric film” was adopted, selecting silver (Ag) as the metal and TiO2 and SiO2 as the dielectric film layer materials. The initial structure was sub |(2TiO2 2SiO2)6(TiO2 SiO2)6Ag| air, and multi-objective optimization was performed with reflectivity and phase difference as the targets. The enhanced silver reflective film samples were prepared using electron-beam evaporation ion-assisted deposition technology, combined with a quartz crystal oscillator and a high-precision optical film thickness monitoring system to control film thickness and deposition rate. After preparation, the samples were subjected to immersion, temperature cycling, adhesion, and damp-heat reliability tests.
    The measured reflectance at 808 nm and 1550 nm was ≥ 97.5% for s-polarized light and ≥ 98.95% for p-polarized light (Fig.7, Fig.8). The phase differences in the two bands measured by ellipsometry were 0.65° ± 0.085° and 0.70° ± 0.08°, respectively (Fig.10). All reliability tests were passed (Table 3). The reflectance decreased by approximately 2% compared to the theoretical value, and the phase difference increased by approximately 0.3°, mainly due to scattering caused by the microscopic roughness of the film layers, slightly lower density of TiO2/SiO2 layers, and cumulative errors in film thickness.
    For the first time, a silver mirror has achieved dual-band high reflectance while maintaining polarization phase control of less than 1°. A film structure of metal plus multilayer dielectric film is used, which is prepared using electron-beam evaporation ion-assisted deposition technology. It plays a key role in the development of the optical system for laser communication terminal. The enhanced silver reflective film undergoes a series of environmental tests, verifying its reliability. The specific processes involved in the design and preparation of this reflective film also provide valuable reference for research on polarization-phase reflective films at other wavelength bands.

     

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