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基于超表面的宽波带光束聚焦研究

胡晨曦, 王吉明, 吴彤, 赫崇君, 顾晓蓉, 刘友文

胡晨曦, 王吉明, 吴彤, 赫崇君, 顾晓蓉, 刘友文. 基于超表面的宽波带光束聚焦研究[J]. 激光技术, 2018, 42(5): 681-686. DOI: 10.7510/jgjs.issn.1001-3806.2018.05.018
引用本文: 胡晨曦, 王吉明, 吴彤, 赫崇君, 顾晓蓉, 刘友文. 基于超表面的宽波带光束聚焦研究[J]. 激光技术, 2018, 42(5): 681-686. DOI: 10.7510/jgjs.issn.1001-3806.2018.05.018
HU Chenxi, WANG Jiming, WU Tong, HE Chongjun, GU Xiaorong, LIU Youwen. Study on focusing of wideband beam based on metasurface[J]. LASER TECHNOLOGY, 2018, 42(5): 681-686. DOI: 10.7510/jgjs.issn.1001-3806.2018.05.018
Citation: HU Chenxi, WANG Jiming, WU Tong, HE Chongjun, GU Xiaorong, LIU Youwen. Study on focusing of wideband beam based on metasurface[J]. LASER TECHNOLOGY, 2018, 42(5): 681-686. DOI: 10.7510/jgjs.issn.1001-3806.2018.05.018

基于超表面的宽波带光束聚焦研究

基金项目: 

中央高校基本科研业务费资助项目 NS2016072

详细信息
    作者简介:

    胡晨曦(1993-), 男, 硕士研究生, 现主要从事矢量光学和超颖表面的研究

    通讯作者:

    王吉明, E-mail:jimingw@nuaa.edu.cn

  • 中图分类号: TN256

Study on focusing of wideband beam based on metasurface

  • 摘要: 超颖表面是一种基于亚波长结构的光学平板膜层,可在亚波长传输范围内调控入射光束的相位、振幅和偏振。为了代替传统的曲面光学元件,采用传输相位调控理论和广义折反射定律,设计了一种新型的超颖表面,并进行了程序模拟,取得了此亚波长结构对光束聚焦调控的数据。结果表明,当增加超颖表面的椭圆基元的长短轴长度时,材料的等效折射率增加,并且适用的波长范围增加到0.7μm~1.2μm;通过优化超表面结构参量,可实现在宽波带范围内的相位调控,进而获得聚焦光场的优化,在一定程度上可以代替传统光学元件实现光学聚焦。该研究结果在超分辨率成像及光刻等方面有一定参考价值,在一些特殊的需要亚波长结构调控光束的情况下可以使光路简单化,并且比传统的光学元件有着厚度方面的优势。
    Abstract: Meta-surface is optical flat film based on sub-wavelength structure, which can regulate phase, amplitude and polarization of incident beam in sub-wavelength range. In order to replace the traditional surface optical elements, one new type of mata-surface was designed by using the transmission phase regulation theory and the generalized reflection law. Program simulation was carried out and the data of beam focused and regulated by the sub-wavelength structure were obtained. The results show that, when the length of long and short axis of elliptical element of mata-surface is longer, equivalent refractive index of material increases at the same time and the applicable wavelength range increases to 0.7μm~1.2μm. By optimizing the mata-surface structure parameters, phase regulation within wide wave band can be realized, and the optimization of the focused light field can be obtained. To a certain extent, it can replace traditional optical elements to realize optical focusing. The results have some reference value in super-resolution imaging and photolithography. It can simplify the optical path in some special demands that sub-wavelength structure can regulate the beams. Compared with the traditional optical elements, mata-surface has the advantages of thickness.
  • Figure  1.   Schematic of the generalized refraction and reflection law

    Figure  2.   Metasurface's cross-sectional schematic

    Figure  3.   Schematic of ellipse Si column

    Figure  4.   Light intensity distribution at different Dx and Dy (λ=915nm, f=40μm)

    a—Dx=0.1μm, Dy=0.2μm b—Dx=0.15μm,
    Dy=0.3μm c—Dx=0.1μm, Dy=0.3μm d—Dx=0.2μm, Dy=0.3μm

    Figure  5.   Light intensity distribution in focal volume(λ=700nm, f=40μm)

    Figure  6.   Light intensity distribution (λ=720nm, f=40μm)

    Figure  7.   Light intensity distribution

    a—λ=740nm b—λ=770nm

    Figure  8.   Light intensity distribution(λ=915nm)

    Figure  9.   Relationship of transmissivity, focal spot diameter and wavelength(Dx=0.1μm, Dy=0.2μm)

    Figure  10.   Light intensity distributions at different wavelengths(Dx=0.15μm, Dy=0.3μm)

    a—λ=0.7μm b—λ=0.8μm c—λ=0.915μm d—λ=1.0μm e—λ=1.1μm f—λ=1.2μm

    Figure  11.   Relationship of transmissivity, focal spot diameter and wavelength(Dx=0.15μm, Dy=0.3μm)

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出版历程
  • 收稿日期:  2017-11-15
  • 修回日期:  2017-12-05
  • 发布日期:  2018-09-24

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