Abstract: In order to satisfy the exciting technique of a master oscillator power amplifier(MOPA) excimer laser for industrial use,a high-repetition and high-accuracy pulse charge power was designed.The power can simultaneously charge the charging capacitors for the dual chamber excimer laser with a LC resonant circuit with a voltage ratio of 1.87.By regulating the work schedule,the power can discharge at kHz level frequency.When the output voltage was about 1300V,the voltage precision was0.18%.The charging voltage can be controlled at high accuracy by the voltage feedback regulation.