Abstract: In order to increase the etching depth with one laser pulse and promote the production efficiency,the effect of laser parameters on the etching depth was studied by means of double acousto-optic modulation technique after comparing the laser pulse etching crater morphology under different pulse energy density and two different lasers.The results showed:when the pulse energy density was 20.21 J/cm2,the etching crater depth reached the maximum,and when continuing to increase the energy density,the crater depth would be reduced;compared with single-cavity laser,the crater depth with two-cavities laser increased from 5μm to 10μm,and the crater diameter reduced from 161 μm to 134μm.