Magnetic-spiker-sustainer excitation technology and uses in excimer laser

Based on the analysis of operating principles of magnetic-spiker-sustainer excitation used in excimer laser,this paper points out the technique is suitable to provide the laser pulses with the high efficiency,high average power and long duration.Experiment results show that the using the technique can generate the 170ns KrF laser pulses and 1μm XeCl laser pulses.