Modulating grids for evaporation and analysis of them
- Received Date: 1988-12-14
- Available Online: 1989-11-25
Abstract: The forms and functions of the modulating grids for the evaporating particle beam during the evaporation are discussed.The relationship among the evaporating rate,the modulating coefficient and the thickness of the depositing film is analysesed at the same time.An applied example of stabilizing the evaporating rate with the modulating grid is given.Some points to be noted in practice is also pointed out.