Laser making technique and perspective of high temperature superconducting film

Fan Yongchang; An Chenwu; Zhou Fengqing; Lu Dongshen

The characteristics and advantages of laser sputtering method for making high temperature surperconducting film are reviewed. The basic mechanism of sputtering and film growing process is disccused. The wide application prospect of laser technology in low temperature making and micropatterning of high temperature surperconducting film is pointed out.

1. Huazhong University of Science and Technology

Received Date: 1989-02-27

Available Online: 1989-09-25

Abstract: The characteristics and advantages of laser sputtering method for making high temperature surperconducting film are reviewed. The basic mechanism of sputtering and film growing process is disccused. The wide application prospect of laser technology in low temperature making and micropatterning of high temperature surperconducting film is pointed out.

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Reference (29)

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Laser making technique and perspective of high temperature superconducting film

Abstract

References

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