[1] |
ZHU Y N.Discussion of the measurement methods for laser induced damage threshold of optical coating[J].Laser Technology,2006,30(5):532-535(in Chinese). |
[2] |
MA Z,LÜB D,XIAO Q.Laser damage mechanisms of optical coating under near threshold energy[J].Laser Technology,2000,24(3):145-147(in Chinese). |
[3] |
SHEN J,WANG J,WU G M,et al.Techniques and applications of sol-gel derived coatings[J].Atomic Energy Science and Technology,2002,36(4/5):305-308(in Chinese). |
[4] |
KOECHNER W.Solid state laser engineering[M].Beijing:SciencePress,2002:601(in Chinese). |
[5] |
ZORC H,SNOWDON K,JOHNSON R L,et al.A comparative study of the stability of hard oxide coatings produced with and without ion Assisted[C]//41st Annual Technical Conference Proceedings.Boston:Society of Vacuum Coaters,1998:243-247. |
[6] |
ZHANG D W,HONG R J,FAN S H,et al.The effect of ion current density in ion beam assisted deposition[J].Acta Phtonica Sinica,2005,34(3):477-480(in Chinese). |
[7] |
ZHANG D P,SHAO J D,ZHAO Y A,et al.LIDT of ZrO2 thin films prepared at different oxygen partial pressure by e-beam evaporation[J].J Vacuum Sci Technol,2005,A23(1):197-200. |
[8] |
ALVISI M,GIULIO M D,MARRONE S G,et al.HfO2 films with high laser damage threshold[J].Thin Sold Films,2000,358(1-2):250-258. |
[9] |
REICHLING M,BODEMANN A,KAISER N.Defect induced laser damage in oxide multilayer coatings for 248nm[J].Thin Solid Films,1998,320(20):264-279. |
[10] |
WELSCH E,ETTRICH K,BLASCHKE H,et al.Investigation of absorption induced damage in ultraviolet dielectric thin films[J].Opt Engng,1997,36(2):504-514. |
[11] |
REICHLING M,WELSCH E,LAN T,et al.Photothermal absorption microscopy of defects in ZrO2 and MgF2 films[J].Opt Engng,1994,33(4):1334-1342. |
[12] |
HU H Y,FAN Z X,LIU Y,et al.Effect of impurities on laser induced damage to 1.06μm optical coatings[J].Chinese Jorunal of Lasers,1999,A26(6):489-492(in Chinese). |
[13] |
ZHANG D W,FAN S H,ZHAO Y A,et al.High laser damage threshold HfO2 films prepared by Ion-assisted electron beam evaporation[J].Applied Surface Science,2005,243(1-4):232-237. |
[14] |
TANG X F,FAN Z X,WANG Z J.Laser-induced damage and optical properties of dual ion beam sputter deposited coatings[J].Acta Optica Sinica,1995,15(2):217-224(in Chinese). |
[15] |
GAO W D,ZHANG W L,FAN S H.Effects of the structure of HfO2 thin films on its laser-induced damage threshold[J].Acta Photonica Snica,2005,24(2):176-179(in Chinese). |
[16] |
FU X Y,KONG M D,MA P.Deposition of HfO2/SiO2 antireflective and high reflective optical thin film by plasma-IAD[J].Optical Technique,1998,24(3):91-93(in Chinese). |
[17] |
FU X Y,KONG M D,HU J P,et al.Deposition of multilayer for pulse laser mirror with high laser induced damage threshold[J].High Power Laser and Partical Beams,1999,11(4):413-417(in Chinese). |
[18] |
GILO M,CROITORU N.Study of HfO2 films prepared by ion-assisted deposition using a gridless end-hall ion source[J].Thin Sold Films,1999,350(1):203-208. |
[19] |
ZHANG D P,SHAO J D,ZHANG D W,et al.Employing oxygen plasma post-treatment to improve LIDT of ZrO2 films prepared by electron beam evaporation method[J].Opt Lett,2004,29(24):2870-2872. |
[20] |
THIELSCH R,GATTO A,HEBER J,et al.A comparative study of the UV optical and structural properties of SiO2 ,Al2O3 ,and HfO2 single layers deposited by reactive evaporation,ion assisted deposition and plasma ion-assisted deposition[J].Thin Solid Films,2002,410(1-2):86-93. |
[21] |
MOHAN S,KRISHNA M G.A review of ion beam assisted deposition of optical thin films[J].Vacuum,1995,46(7):645-659. |
[22] |
FAN R Y,LU Y M.Ion-assisted deposition of optical thin films at different ion beam energies[J].Chinese Journal of Lasers,1991,18(5):353-356(in Chinese). |
[23] |
WILLEY R R,MELBOURNE F L.Improvements in gridless ion source performance[C]//38th Annual Technical Conference Proceedings.Boston:Society of Vacuum Coaters,1995:232-236. |
[24] |
ALVISI M,TOMASI F D,PERRONE M R.Laser damage dependence on structural and optical properties of ion-assisted HfO2 thin films[J].Thin Solid Films,2001,396(1-2):44-52. |
[25] |
ROBIC J Y,LEPLAN H,PAULEAU Y.Residual stress in silicon dioxide thin films produced by ion-assisted deposition[J].Thin Solid Films,1996,290-291:34-39. |
[26] |
ANDRE B,POUPINET L,RAVEL G.Evaporation and ion assisted deposition of HfO2 coatings-some key points for high power laser applications[J].J Vacuum Sci & Technol,2000,A18(5):2372-2377. |
[27] |
RAFAEL R M,TAKANORI M,IPPEI S.Growth and structure control of HfO2-x films with cubic and tetragonal structures obtained by ion beam assisted deposition[J].J Vacuum Sci Technol,2002,A20(2):549-554. |