Direct laser writing of thin platinum film resistors

WU Bo; WU Yun-feng; KUANG Yan

In order to study the application of laser direct writing technology in the fabrication of thin platinum film resistors,platinum resistors in 2m thick were manufactured by means of laser direct writing.The fabrication mechanism of thin platinum film resistors was discussed.Taking strip platinum resistors as an example,the effect of the laser parameters on the figures of platinum resistors was studied.A 0.37 strip thin platinum film resistor was manufactured under the condition that the optimal laser pulse repetition frequency was 18kHz and the laser scanning speed was 100mm/s.Finally,the resistance of the platinum resistors was tested.The results indicate that the width of platinum resistor increases with the increase of laser pulse frequency and the increase of laser scan frequency independently.The edge of the manufactured resistor is neat and the surface is smooth.The relative deviation of the actual resistance to the theoretical one is only 0.8%.

Corresponding author: WU Bo, yfwu_72@163.com;

1. School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu 610054, China

Received Date: 2011-07-12

Accepted Date: 2011-09-13

Available Online: 2012-05-25

Abstract: In order to study the application of laser direct writing technology in the fabrication of thin platinum film resistors,platinum resistors in 2m thick were manufactured by means of laser direct writing.The fabrication mechanism of thin platinum film resistors was discussed.Taking strip platinum resistors as an example,the effect of the laser parameters on the figures of platinum resistors was studied.A 0.37 strip thin platinum film resistor was manufactured under the condition that the optimal laser pulse repetition frequency was 18kHz and the laser scanning speed was 100mm/s.Finally,the resistance of the platinum resistors was tested.The results indicate that the width of platinum resistor increases with the increase of laser pulse frequency and the increase of laser scan frequency independently.The edge of the manufactured resistor is neat and the surface is smooth.The relative deviation of the actual resistance to the theoretical one is only 0.8%.

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Reference (14)

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Direct laser writing of thin platinum film resistors

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References

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通讯作者: 陈斌, bchen63@163.com

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