Development of controller for excimer laser based on optical fiber

SHI Meng-meng; JIANG Hai-he; DENG Guo-qing; HE Long-hai

To solve the problem of that the electromagnetic interference (EMI) induced by a working excimer laser, which might affect the signal of the laser control system, the analog and digital optical fiber models for signal transmission and embedded eximer laser control system were designed by transmitting the signals with optical fibers for their character of immunity to EMI. It was proved that the system's analog channel's-3dB bandwidth was DC-3MHz,its max nonlinearity was 1.2%, and the control system was stable and reliable while the excimer laser working. Experiment results indicate that this system have good character of immunity to EMI.

Corresponding author: JIANG Hai-he, hjiang@aiofm.ac.cn;

1. Anhui Institute of Optics Fine Mechanics, Chinese Academy of Sciences, Hefei 230031

Received Date: 2007-10-09

Accepted Date: 2008-07-24

Available Online: 2009-02-25

Abstract: To solve the problem of that the electromagnetic interference (EMI) induced by a working excimer laser, which might affect the signal of the laser control system, the analog and digital optical fiber models for signal transmission and embedded eximer laser control system were designed by transmitting the signals with optical fibers for their character of immunity to EMI. It was proved that the system's analog channel's-3dB bandwidth was DC-3MHz,its max nonlinearity was 1.2%, and the control system was stable and reliable while the excimer laser working. Experiment results indicate that this system have good character of immunity to EMI.

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Reference (11)

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Development of controller for excimer laser based on optical fiber

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References

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通讯作者: 陈斌, bchen63@163.com

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