Theoretical analysis for deposition of HTSC films over large area by laser scanning ablation

A method, laser scanning ablation,for deposition of well-distributed high Tc supercon-ductivity(HTSC)films over large area was presented,and a mathemathtical model for the method was established.By means of mathmatics analysis,it was shown that the distribution of film thickness depended on the laser scanning radius and the distance between substrate and target.Also indicated by the analysis results,there was an optimum scanning radius for achieving a maximum film in the range of requisite uniforinity. And the results were agreed with experiments.