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Volume 29 Issue 2
Sep.  2013
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Citation:
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Experimental study on transverse affect zone in excimer laser direct etching

  • 1.

    School of Mechanical Science and Engineering, HUST, Wuhan 430074, China

  • Corresponding author: SHI Tie-lin, tlshi@public.wh.hb.cn
  • Received Date: 2004-03-30
    Accepted Date: 2004-05-09
  • The experiments of micro-machining metal and semiconductor pieces by 248nm KrF excimer laser directetching are carried out.Transverse affect zone is observed on the machined samples'surface.It includes two regions which are described by their dimension and color.The relationship between the regions and the parameters of the laser are studied.The measures to reduce the transverse affect zone are also provided based on the results of the experi ments.
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    BRANNON J H.Excimer-laser ablation and etching[J].IEEE Circuits Devices,1990,6:18～24.
    [2]

    LAUDE L D.Excimer lasers[M].Dordrecht:Kluwer Academic,1994.
    [3] 范永昌,戴尔 P E,凯夷 P H.KrF准分子激光烧蚀氧化镁单晶的实验研究[J].激光技术,1995,19(5):283～285.
    [4] 林振能,沈建新,廖文和.193nm 准分子激光切削角膜的研究[J].激光技术,2003,27(6):510～513.
    [5] 马炳和,苑伟政,李铁军 et al.准分子激光直接刻蚀单晶硅研究[J].西北工业大学学报,2000,18(3):491～495.
    [6] 李呈德,万盈,陈涛 et al.准分子激光微加工用Schwarzchild物镜设计[J].应用激光,2001,21(1):13～15.
    [7] 江超,王又青,胡少六 et al.248nm KrF准分子激光精密加工Al2O3的实验研究[J].激光杂志,2002,23(2):59～61.
    [8] 江超,王又青. KrF准分子激光精密加工K9光学玻璃的实验研究[J].电加工与模具,2003(2):33～35.
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Experimental study on transverse affect zone in excimer laser direct etching

    Corresponding author: SHI Tie-lin, tlshi@public.wh.hb.cn
  • 1. School of Mechanical Science and Engineering, HUST, Wuhan 430074, China
  • Received Date: 2004-03-30
  • Accepted Date: 2004-05-09
  • Available Online: 2005-03-25

Abstract: The experiments of micro-machining metal and semiconductor pieces by 248nm KrF excimer laser directetching are carried out.Transverse affect zone is observed on the machined samples'surface.It includes two regions which are described by their dimension and color.The relationship between the regions and the parameters of the laser are studied.The measures to reduce the transverse affect zone are also provided based on the results of the experi ments.

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