Long guide rail alignment systems based on position sensitive detectors

LUO Kai; CHEN Peifeng; WANG Ying

doi:10.7510/jgjs.issn.1001-3806.2018.01.006

Volume 42 Issue 1

Jan. 2018

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Long guide rail alignment systems based on position sensitive detectors

School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China

Corresponding author: CHEN Peifeng, pfchen@hust.edu.cn ;
Received Date: 2017-02-22
Accepted Date: 2017-04-13

Abstract

In order to detect the long rail straightness, laser was used as the reference line, and 2-D position sensitive detector was used as photoelectric converter. When 2-D position sensitive detector was fixed on the guide rail slider and moved along the guide rail, the spot position data was transmitted to the terminal through bluetooth module. After entering the location information, the curve of 2-D straightness was drawn by the software automatically. The results show that, through theoretical analysis, the error of laser deflection angle is calculated and is less than 1μm. The system accuracy is verified by high-precision displacement platform experiment and reaches 3.4μm. In practical appliaction, a long rail of 7.2m is detected and the straightness data of long guide rail is obtained. The repeatability precision can reach 5μm. The study is helpful for straightness measurement of long rails.
- laser technique,
- laser alignment,
- contrast experiment,
- position sensitive detector

References

[1]	WANG Y P. Research of flatness and linearity testing system[D].Shenyang: Shenyang University of Technology, 2004: 9-38(in Chin-ese).
[2]	YUE W L, WU Y. A fast evaluation method for flatness and straightness tolerance by means of incremental algorithm[J].Acta Metrologica Sinica, 2008, 29(2):120-123(in Chinese).
[3]	HUANG F G, CUI Ch C. Comparison of evaluating precision of straightness error between least square method and least envelope zone method[J].Optics and Precision Engineering, 2007, 15(6):879-893(in Chinese).
[4]	LI Y J, ZHENG Z G. Calculation of straightness error and computerization[J].China Measurement Technology, 2007, 33(3):67-69(in Chinese).
[5]	HU Zh X. Research on digitized evaluation theory and algorithm for the straightness error[D].Hunan: Hunan University, 2012: 15-94(in Chinese).
[6]	SONG Q. Research on straightness measurement system of long rails based on 2D-PSD[D]. Changchun: Changchun University of Science and Technology, 2014: 2-20(in Chinese).
[7]	LI F. Study on straightness testing system of super-length guideway[D]. Changchun: Changchun University of Science and Technology, 2002: 2-15(in Chinese).
[8]	LÜ A M, WANG Zh X, HE A Zh, et al. Measuring the straightness of the long slideway using PSD[J].Journal of Transducer Technology, 1996(5):55-56(in Chinese).
[9]	JIA T X, XU X P, DONG W B. Design of automatic testing system for 2-D position sensitive detector(PSD)[J]. Instrument Technique and Sensor, 2012(10):67-69(in Chinese).
[10]	MA Ch G, YUAN H X, HE A Zh. Research of anti-jamming in facula orientation[J]. Laser Technology, 2002, 26(4):308-310(in Chinese).
[11]	MOU L N. Displacement detection system design based on PSD[D]. Taiyuan: North Central University, 2007: 2-30(in Chinese).
[12]	LIU P, GAO L M, LE K D. Laser measurement system for rail linearity[J]. Laser Technology, 2009, 33(6):575-578(in Chinese).
[13]	HU Ch D, LI Y Q, Zh X, et al. Laser alignment measuring and testing equipment based on interference fringe[J]. Laser Technology, 2009, 33(5):522-525(in Chinese).
[14]	YANG Sh L, SU Y B, HE J T, et al. Study of measurement accuracy of position sensitive detectors[J]. Laser Technology, 2014, 38(6):830-834(in Chinese).
[15]	FENG Q B, LIANG J W. Development of a single mode fiber laser collimator[J]. Laser Technology, 1994, 18(6):357-360(in Ch-inese).
[16]	LÜ A M, YUAN H X, HE A Zh. The research in the influence of beam spot on the precision of PSD[J]. Laser Technology, 1998, 22(5):294-297(in Chinese).
[17]	LÜ A M, YUAN H X, HE A Zh. Experimental study of the effect of light source on position precision of PSD[J]. Laser Technology, 2000, 24(3):192-195(in Chinese).
[18]	FENG Q B, ZHANG B, KUANG C F. A straightness measurement system using a single-mode fiber-coupled laser module[J]. Optics & Laser Techology, 2004, 36(4):279-283.
[19]	SONG C, YENG Ch S. Linearity indices and linearity improvement of 2-D tetralateral position-sensitive detector[J]. IEEE Transactions on Electron Devices, September, 2010, 57(9):2310-2316. doi: 10.1109/TED.2010.2051862
[20]	LIU Ch, MA Y. Nonlinear correction of PSD with genetic algorithm based on neural network[J]. Journal of Electronic Measurement and Instrument, 2015, 29(8):1157-1163(in Chinese).
[21]	LIN Q S, YANG X J, WANG J X, et al. 2-D nonlinear correction in an improved BP neural network[J]. Laser Technology, 2012, 36(1):124-130(in Chinese).
[22]	LI Zh K, QIN Y Y. Research of on-line measurement and non-linearity correction of two dimention PSD device[J]. Laser Technology, 2004, 28(4):370-372(in Chinese).
[23]	EKINCI O, MAYER J R R. Relationships between straightness and angular kinematic errors in machines[J]. International Journal of Machine Tools & Manufacture, 2007, 47(12/13):1997-2004.

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通讯作者: 陈斌, bchen63@163.com

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引言

导轨直线度^[1-2]是评价机床质量的重要指标, 直接影响机床加工出来的产品精度和机床质量。在机床生产过程中，检测机床直线度并进行修正^[3-5]是提升机床质量关键的环节。

导轨直线度的传统检测方法有平尺法、钢丝法等。目前国内普遍采用的通用工具如水平仪、自准直仪等^[6]，多是以测量元件的精度为基准, 人为引入的误差较大, 其检测精度难以满足目前工业界的需要^[7]。激光具有高方向性以及高亮度等优点，非常适合作为测量的基准。使用激光作为测量基准的测量方法与传统测量方法相比，具有测量精度高、体积小、几乎不受被测导轨长度的制约等优点^[8]。随着科技的发展, 直线度检测发展至自动测量^[9], 其中，以图像控制器(charge-coupled device，CCD)或光斑位置传感器^[10](position-sensitve device, PSD)等光电传感器为核心的激光准直技术被不断应用在直线度检测领域中^[11-13]，使得直线度准直精度至少提升了一个数量级^[14]。本文中介绍的基于PSD的长导轨准直系统，以精度为3.4μm的PSD为接收器，测量长度为7.2m的导轨，重复精度优于5μm。

2. 硬件设计

用Reallight公司生产的He-Ne激光器输出单模激光，功率约为5mW^[18]。扩束准直分别使用焦距为8mm以及200mm的凸面镜，80mm镜片焦点处放置直径为0.1mm的小孔进行空间滤波。滤波后激光准直性和单色性得到增强。

接收模块核心部件PSD为日本滨松公司生产的S1880型2维位置传感器，光斑重心测量精度为3.4μm。PSD安装在C9069型电路板上，PSD接收光斑后输出光斑的重心坐标给电路板，由于PSD本身的枕形结构^[19]，电路板使用特定的算法^[20-21]修正了这一结构带来的误差^[22]。输出接口为RS232串行接口, 接上蓝牙模块即可在30m内进行数据的无线传输。

4. 结论

设计出了一套安装简单、使用方便的导轨准直系统，能够满足高精度导轨直线度的测量要求。通过理论计算，排除了激光偏角的影响，通过实验验证了PSD的精度，达到了3.4μm；通过工厂的实验，证明导轨准直系统在测量7.2m长的导轨时，重复精度可以达到5μm，满足高精度导轨直线度的测量要求。

Reference (23)

[1]	WANG Y P. Research of flatness and linearity testing system[D].Shenyang: Shenyang University of Technology, 2004: 9-38(in Chin-ese).
[2]	YUE W L, WU Y. A fast evaluation method for flatness and straightness tolerance by means of incremental algorithm[J]. Acta Metrologica Sinica, 2008, 29(2): 120-123.
[3]	HUANG F G, CUI Ch C. Comparison of evaluating precision of straightness error between least square method and least envelope zone method[J]. Optics and Precision Engineering, 2007, 15(6): 879-893.
[4]	LI Y J, ZHENG Z G. Calculation of straightness error and computerization[J]. China Measurement Technology, 2007, 33(3): 67-69.
[5]	HU Zh X. Research on digitized evaluation theory and algorithm for the straightness error[D].Hunan: Hunan University, 2012: 15-94(in Chinese).
[6]	SONG Q. Research on straightness measurement system of long rails based on 2D-PSD[D]. Changchun: Changchun University of Science and Technology, 2014: 2-20(in Chinese).
[7]	LI F. Study on straightness testing system of super-length guideway[D]. Changchun: Changchun University of Science and Technology, 2002: 2-15(in Chinese).
[8]	LÜ A M, WANG Zh X, HE A Zh. Measuring the straightness of the long slideway using PSD[J]. Journal of Transducer Technology, 1996, (5): 55-56.
[9]	JIA T X, XU X P, DONG W B. Design of automatic testing system for 2-D position sensitive detector(PSD)[J]. Instrument Technique and Sensor, 2012, (10): 67-69.
[10]	MA Ch G, YUAN H X, HE A Zh. Research of anti-jamming in facula orientation[J]. Laser Technology, 2002, 26(4): 308-310.
[11]	MOU L N. Displacement detection system design based on PSD[D]. Taiyuan: North Central University, 2007: 2-30(in Chinese).
[12]	LIU P, GAO L M, LE K D. Laser measurement system for rail linearity[J]. Laser Technology, 2009, 33(6): 575-578.
[13]	HU Ch D, LI Y Q, Zh X. Laser alignment measuring and testing equipment based on interference fringe[J]. Laser Technology, 2009, 33(5): 522-525.
[14]	YANG Sh L, SU Y B, HE J T. Study of measurement accuracy of position sensitive detectors[J]. Laser Technology, 2014, 38(6): 830-834.
[15]	FENG Q B, LIANG J W. Development of a single mode fiber laser collimator[J]. Laser Technology, 1994, 18(6): 357-360.
[16]	LÜ A M, YUAN H X, HE A Zh. The research in the influence of beam spot on the precision of PSD[J]. Laser Technology, 1998, 22(5): 294-297.
[17]	LÜ A M, YUAN H X, HE A Zh. Experimental study of the effect of light source on position precision of PSD[J]. Laser Technology, 2000, 24(3): 192-195.
[18]	FENG Q B, ZHANG B, KUANG C F. A straightness measurement system using a single-mode fiber-coupled laser module[J]. Optics & Laser Techology, 2004, 36(4): 279-283.
[19]	SONG C, YENG Ch S. Linearity indices and linearity improvement of 2-D tetralateral position-sensitive detector[J]. IEEE Transactions on Electron Devices, September, 2010, 57(9): 2310-2316. doi: 10.1109/TED.2010.2051862
[20]	LIU Ch, MA Y. Nonlinear correction of PSD with genetic algorithm based on neural network[J]. Journal of Electronic Measurement and Instrument, 2015, 29(8): 1157-1163.
[21]	LIN Q S, YANG X J, WANG J X. 2-D nonlinear correction in an improved BP neural network[J]. Laser Technology, 2012, 36(1): 124-130.
[22]	LI Zh K, QIN Y Y. Research of on-line measurement and non-linearity correction of two dimention PSD device[J]. Laser Technology, 2004, 28(4): 370-372.
[23]	EKINCI O, MAYER J R R. Relationships between straightness and angular kinematic errors in machines[J]. International Journal of Machine Tools & Manufacture, 2007, 47(12/13): 1997-2004.

theory displacement/μm	actual displacement/μm	deviationvalue/μm
56	54.70	1.30
43	44.40	1.40
229	232.50	3.50
107	109.45	2.45
233	235.82	2.82
115	116.35	1.35
69	71.70	2.70
232	232.50	0.50
107	106.05	0.94
59	58.10	0.90
58	61.59	3.59
120	119.60	0.40
60	61.59	1.59
59	58.10	0.90
105	105.30	0.30

Long guide rail alignment systems based on position sensitive detectors

Abstract

References

Proportional views

通讯作者: 陈斌, bchen63@163.com

Proportional views

Long guide rail alignment systems based on position sensitive detectors

Corresponding author: CHEN Peifeng, pfchen@hust.edu.cn;

HTML

3.1. 关于PSD倾斜带来的误差分析

3.2. PSD精度验证实验

3.3. 导轨精度检测实验

Catalog

Long guide rail alignment systems based on position sensitive detectors

Abstract

References

Proportional views

通讯作者: 陈斌, bchen63@163.com

Proportional views

Long guide rail alignment systems based on position sensitive detectors

Corresponding author: CHEN Peifeng, pfchen@hust.edu.cn;

HTML

3.1. 关于PSD倾斜带来的误差分析

3.2. PSD精度验证实验

3.3. 导轨精度检测实验

Catalog

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