Microsurface profile measurement system based on two-step phase-shifting interference

CAI Huaiyu; LI Guangyao; HUANG Zhanhua

doi:10.7510/jgjs.issn.1001-3806.2016.01.005

To measure microsurface profile of an object, a spatial two-step phase-shifting interferometer was proposed based on an improved Michelson architecture. Based on a Tyman-Grean polarization interferometer, the improved Michelson architecture was used as beam-splitting unit, two linear polarizing plates with polarization direction of 0 and 45 were taken as phase-shifting elements. The interferometer can simultaneously capture two interferograms with phase shift of 90 with a single CCD camera. Phases were extracted and surface topography information was obtained by discrete Hilbert transform. A two-step phase-shifting interferometer was set up and glass plate surface was measured to verify the feasibility of this system. In the laboratory environment, the root mean square error of measurement results was less than 0.02. The system can be used in measurement of microsurface profile and has good stability.

Microsurface profile measurement system based on two-step phase-shifting interference

1. Key Laboratory of Opto-electronics Information Technology(Tianjin University)of Ministry of Education, College of Precision Instrument and Optoelectronics Engineering, Tianjin University, Tianjin 300072, China

Received Date: 2014-11-24

Accepted Date: 2014-12-10

Available Online: 2016-01-25

Abstract: To measure microsurface profile of an object, a spatial two-step phase-shifting interferometer was proposed based on an improved Michelson architecture. Based on a Tyman-Grean polarization interferometer, the improved Michelson architecture was used as beam-splitting unit, two linear polarizing plates with polarization direction of 0 and 45 were taken as phase-shifting elements. The interferometer can simultaneously capture two interferograms with phase shift of 90 with a single CCD camera. Phases were extracted and surface topography information was obtained by discrete Hilbert transform. A two-step phase-shifting interferometer was set up and glass plate surface was measured to verify the feasibility of this system. In the laboratory environment, the root mean square error of measurement results was less than 0.02. The system can be used in measurement of microsurface profile and has good stability.

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Reference (13)

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Microsurface profile measurement system based on two-step phase-shifting interference

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