Research of deposition characteristics of Cr atoms in laser standing wave field with straight edge diffraction

XIAO Yuxin; ZHANG Wentao

doi:10.7510/jgjs.issn.1001-3806.2015.02.015

In order to study the diffraction effect of deposition substrate on laser standing wave field, 3-D motion trail and stripe structure were simulated using the fourth-order Runge-Kutta algorithm under straight edge diffraction effect based on the semi-classical theory. The distance from laser beam waist center to mirror and the effect of the radius of Gaussian laser beam waist on the process of final deposition were discussed. The results show that diffractive degree will be changed by adjusting the experiment parameters reasonably. The quality of deposition stripe structure will be achieved optimally when the mirror is placed on the cross section of laser beam waist, and the radius of Gaussian laser beam waist equals 62.5μm. It provides the useful theoretical foundation and data information in the field of atomic lithography study.

Research of deposition characteristics of Cr atoms in laser standing wave field with straight edge diffraction

Corresponding author: ZHANG Wentao, glietzwt@163.com

1. Department of Electrical Engineering and Automation, Guilin University of Electronic Technology, Guilin 541004, China

Received Date: 2014-02-24

Accepted Date: 2014-03-19

Available Online: 2015-03-25

Abstract: In order to study the diffraction effect of deposition substrate on laser standing wave field, 3-D motion trail and stripe structure were simulated using the fourth-order Runge-Kutta algorithm under straight edge diffraction effect based on the semi-classical theory. The distance from laser beam waist center to mirror and the effect of the radius of Gaussian laser beam waist on the process of final deposition were discussed. The results show that diffractive degree will be changed by adjusting the experiment parameters reasonably. The quality of deposition stripe structure will be achieved optimally when the mirror is placed on the cross section of laser beam waist, and the radius of Gaussian laser beam waist equals 62.5μm. It provides the useful theoretical foundation and data information in the field of atomic lithography study.

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Reference (15)

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Research of deposition characteristics of Cr atoms in laser standing wave field with straight edge diffraction

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通讯作者: 陈斌, bchen63@163.com

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