A high resolution defect detection system for ITO lines

A defect detection system for lines on indium tin oxide glass was designed and the detection precision reached 2m.Firstly,higher image magnification and image accuracy were obtained by using a high resolution linear CCD camera and the telephoto lenses;secondly,larger dynamic range was realized through the separation of camera and lens and a suitable modulation transfer function value was achieved through ceiling mounting the lens;the system precision and system stability were improved with a linear motor.At the same time,marble base was used to reduce the influence of surrounding vibration on the accuracy of the system.Finally,the advantages and disadvantages of system with different structure were concretely analyzed.Experiments show that the system has high precision,high stability,flexible operation,and other notable features.