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Volume 37 Issue 1
Apr.  2013
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Article Navigation >  LASER TECHNOLOGY  > 2013 >  37(1): 97-100

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Study on pulse charge power for a dual-chamber excimer laser

  • 1.

    Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei 230031, China;

  • 2.

    School of Electronic Science & Applied Physics, Hefei University of Technology, Hefei 230009, China

  • Corresponding author: FANG Xiao-dong, Xdfang@aiofm.ac.cn
  • Received Date: 2012-04-09
    Accepted Date: 2012-05-10
  • In order to satisfy the exciting technique of a master oscillator power amplifier(MOPA) excimer laser for industrial use,a high-repetition and high-accuracy pulse charge power was designed.The power can simultaneously charge the charging capacitors for the dual chamber excimer laser with a LC resonant circuit with a voltage ratio of 1.87.By regulating the work schedule,the power can discharge at kHz level frequency.When the output voltage was about 1300V,the voltage precision was0.18%.The charging voltage can be controlled at high accuracy by the voltage feedback regulation.
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    沈阳化工大学材料科学与工程学院 沈阳 110142

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Study on pulse charge power for a dual-chamber excimer laser

    Corresponding author: FANG Xiao-dong, Xdfang@aiofm.ac.cn
  • 1. Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei 230031, China;
  • 2. School of Electronic Science & Applied Physics, Hefei University of Technology, Hefei 230009, China
  • Received Date: 2012-04-09
  • Accepted Date: 2012-05-10
  • Available Online: 2013-01-25

Abstract: In order to satisfy the exciting technique of a master oscillator power amplifier(MOPA) excimer laser for industrial use,a high-repetition and high-accuracy pulse charge power was designed.The power can simultaneously charge the charging capacitors for the dual chamber excimer laser with a LC resonant circuit with a voltage ratio of 1.87.By regulating the work schedule,the power can discharge at kHz level frequency.When the output voltage was about 1300V,the voltage precision was0.18%.The charging voltage can be controlled at high accuracy by the voltage feedback regulation.

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