Broadband design and optimization of acousto-optic deflector based on simplified real frequency technology

In order to solve the impedance mismatch problem of acousto-optic deflector, a simple real frequency technology was used to establish a reciprocal lossless two port network analysis model of the transducer, and the electronic components in the broadband impedance matching circuit were optimized. On this basis, the verification of broadband impedance matching of acousto-optic deflector with center frequency of 165 MHz and target bandwidth of 80 MHz was carried out. The results show that, the experimental results are consistent with the theoretical simulation. The diffraction efficiency of the packaged acousto-optic deflector in the full bandwidth is more than 86.5%. This result has an effect on improving the overall performance parameters of the quartz level acousto-optic deflector, and can provide an inertial free high-speed scanning device with superior performance for laser precision micro nano manufacturing.