Development of displacement measurement technologies based on grating interferometry

WANG Guo-chao; YAN Shu-hua; GAO Lei; XIE Xue-dong; TIAN Zhen

doi:10.3969/j.issn.1001-3806.2010.O5.023

Volume 34 Issue 5

Oct. 2010

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Development of displacement measurement technologies based on grating interferometry

1.
College of Mechatronics Engineering and Automation, National University of Defense Technology, Changsha 410073, China

Corresponding author: YAN Shu-hua, yanshuhua996@163.com ;
Received Date: 2009-10-29
Accepted Date: 2009-12-27

Abstract

Methods of displacement measurement based on grating interFerometry, including classical dual-grating measurement systems,nonsymmetrical doubly blazed reference grating measurement systems,single grating measurement systems,grating measurement systems based on the 2nd harmonic Moiré fringes, concentric-circle grating two-dimension displacement measurement systems,and the two-dimension grating measurement systems, were introduced. The key problems and disadvantages of each system were presented as well. According to dual-frequency laser interferometer the dual-wavelength single grating nanometer displacement measurement was put forth based on the single grating measurement system.After analyzing its characteristics,it was pointed out that it could realize the measurement with a wide range,nanometer precision and nanometer resolution. After a general comparison among these methods,a conclusion of key technologies was drawn,and an outlook of displacement measurement based on grating interferometry was presented.
- measurement and metrology,
- displacement,
- grating,
- interferometric fringe

References

[1]	WALKER C A.Historical review of Moiré interferometry[J].Experimental Mechanics,1994,34(4):281-299.
[2]	CAO J L.Research on the displacement measurement technology of wide range high resolution with the grating[D].Changsha:National University of Defense Technology,2006:4-5(in Chinese).
[3]	SU Sh J,LIU H,LU H B,et al.Doppler analysis for double-grating displacement measurement system with nanometer resolution[J].Optics and Precision Engineering,2003,11(1):17-21(in Chinese).
[4]	JIE D G,LIU Y J,SUN L N,et al.A novel high speed/high precision displacement measurement method using double grating scales for a micro driven system[C]//IEEE Robot Automat Society,IEEE International Conference on Robotics and Biomimetics.Kunming,China:IEEE,2006:1588-1593.
[5]	JOURLIN Y,JAY J,PANIAUX O.Compact diffractive interferometric displacement sensor in reflection[J].Precision Engineering,2002,26(1):1-6.
[6]	van GORP B,ONARAN A G,DEGERTEKIN F L.Integrated dual grating method for extended range interferometric displacement detection in probe microscopy[J].A P L,2007,91(8):100-106.
[7]	TORCAL-MILLA F J,SANCHEZ-BREA L M,BERNABEU E.Talbot effect with rough reflection gratings[J].Appl Opt,2007,46(18):3668-3673.
[8]	CHEN Z F,LU H B,ZHANG Sh Z.A novel wide range nano-resolution ultra-precise diameter measurement instrument[J].Aviation Precision Manufacturing Technology,2001,37(4):32-34(in Chinese).
[9]	CHU X Ch.Research on key technology of nanometer displacement measurement by grating[D].Changsha:National University of Defense Technology,2005:12-14(in Chinese).
[10]	XU D M,WENG C F,LEI M R.Research on the high accuracy displacement measuring and display system[C]//Chinese Society Modern Technology Equipment 7th International Symposium on Test and Measurement.Beijing:International Academic Publishers,2007:3515-3518(in Chinese).
[11]	CHU X Ch,LU H B,ZHAO Sh H.Wide range grating interferometer with nanometer resolution[J].Opto-electronic Engineering,2008,35(1):56-59(in Chinese).
[12]	MA X Sh,FEI Y T,CHEN X H,et al.Theory study of a new nanometrology grating[J].Chinese Journal of Scientific Instrument,2006,27(2):159-164(in Chinese).
[13]	CHAN H M,YEN K S,RATNAM M M.Crack displacement sensing and measurement in concrete using circular grating Moiré fringes and pattern matching[J].Proc SPIE,2008,7155:715529/1-715529/8.
[14]	PARK Y C,KIM S W.Optical measurement of spindle radial motion by Moiré technique of concentric-circle gratings[J].International Journal of Machine Tools and Manufacture,1994,34(7):1019-1030.
[15]	LATIME P.Talbot plane patterns:grating image or interference effects[J].Appl Opt,1993,32(7):1078-1083.
[16]	XIA H J,FEI Y T.Error analysis of 2-D diffraction grating interferometer for high-resolution displacement measurement[J].Proc SPIE,2008,7130:13052-13055.
[17]	WANG X Z,DONG X H,GUO J,et al.Two-dimensional displacement sensing using a cross diffraction grating scheme[J].Journal of Optics,2004,A6(1):106-111.
[18]	ZHAO B,YAN L,HAO D F.Experimental study about a type of gratings interferometer[J].Chinese Journal of Scientific Instrument,2001,22(1):271-274(in Chinese).
[19]	ZHU M Ch,ZHOU Zh F,ZHANG T.Research of the He-Ne laser-wave interferometer[J].Laser Technology,2004,28(5):531-533(in Chinese).
[20]	LEE J Y,CHEN H Y,HSU C C,et al.Optical heterodyne grating interferometry for displacement measurement with subnanometric resolution[J].Sensors and Actuators,2007,137(1):185-191.
[21]	FERHANOGLU O,TOY M F,UREY H.Two-wavelength grating interferometry for MEMS sensors[J].Photonics Technology,2007,19(21/24):1895-1897.
[22]	WANG F,QI X D.Grating heterodyne interferometer of high accuracy controlling photoelectric grating ruling engine[J].Laser Technology,2008,32(5):474-476(in Chinese).
[23]	QIAO N Sh,ZHAO H J,CAI X H,et al.Study of profilometry based on two-frequency grating[J].Journal of Optoelectronics·Laser,2008,19(1):74-77(in Chinese).
[24]	WANG X H,HE X D,FU Y J.The real-time measurement by two-frequency grating[J].Laser Technology,2007,31(4):384-387(in Chinese).

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通讯作者: 陈斌, bchen63@163.com

1.
沈阳化工大学材料科学与工程学院沈阳 110142

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Development of displacement measurement technologies based on grating interferometry

Corresponding author: YAN Shu-hua, yanshuhua996@163.com;

1. College of Mechatronics Engineering and Automation, National University of Defense Technology, Changsha 410073, China

Received Date: 2009-10-29

Accepted Date: 2009-12-27

Available Online: 2010-09-25

Abstract: Methods of displacement measurement based on grating interFerometry, including classical dual-grating measurement systems,nonsymmetrical doubly blazed reference grating measurement systems,single grating measurement systems,grating measurement systems based on the 2nd harmonic Moiré fringes, concentric-circle grating two-dimension displacement measurement systems,and the two-dimension grating measurement systems, were introduced. The key problems and disadvantages of each system were presented as well. According to dual-frequency laser interferometer the dual-wavelength single grating nanometer displacement measurement was put forth based on the single grating measurement system.After analyzing its characteristics,it was pointed out that it could realize the measurement with a wide range,nanometer precision and nanometer resolution. After a general comparison among these methods,a conclusion of key technologies was drawn,and an outlook of displacement measurement based on grating interferometry was presented.

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Reference (24)

[1]	WALKER C A.Historical review of Moiré interferometry[J].Experimental Mechanics,1994,34(4):281-299.
[2]	CAO J L.Research on the displacement measurement technology of wide range high resolution with the grating[D].Changsha:National University of Defense Technology,2006:4-5(in Chinese).
[3]	SU Sh J,LIU H,LU H B,et al.Doppler analysis for double-grating displacement measurement system with nanometer resolution[J].Optics and Precision Engineering,2003,11(1):17-21(in Chinese).
[4]	JIE D G,LIU Y J,SUN L N,et al.A novel high speed/high precision displacement measurement method using double grating scales for a micro driven system[C]//IEEE Robot Automat Society,IEEE International Conference on Robotics and Biomimetics.Kunming,China:IEEE,2006:1588-1593.
[5]	JOURLIN Y,JAY J,PANIAUX O.Compact diffractive interferometric displacement sensor in reflection[J].Precision Engineering,2002,26(1):1-6.
[6]	van GORP B,ONARAN A G,DEGERTEKIN F L.Integrated dual grating method for extended range interferometric displacement detection in probe microscopy[J].A P L,2007,91(8):100-106.
[7]	TORCAL-MILLA F J,SANCHEZ-BREA L M,BERNABEU E.Talbot effect with rough reflection gratings[J].Appl Opt,2007,46(18):3668-3673.
[8]	CHEN Z F,LU H B,ZHANG Sh Z.A novel wide range nano-resolution ultra-precise diameter measurement instrument[J].Aviation Precision Manufacturing Technology,2001,37(4):32-34(in Chinese).
[9]	CHU X Ch.Research on key technology of nanometer displacement measurement by grating[D].Changsha:National University of Defense Technology,2005:12-14(in Chinese).
[10]	XU D M,WENG C F,LEI M R.Research on the high accuracy displacement measuring and display system[C]//Chinese Society Modern Technology Equipment 7th International Symposium on Test and Measurement.Beijing:International Academic Publishers,2007:3515-3518(in Chinese).
[11]	CHU X Ch,LU H B,ZHAO Sh H.Wide range grating interferometer with nanometer resolution[J].Opto-electronic Engineering,2008,35(1):56-59(in Chinese).
[12]	MA X Sh,FEI Y T,CHEN X H,et al.Theory study of a new nanometrology grating[J].Chinese Journal of Scientific Instrument,2006,27(2):159-164(in Chinese).
[13]	CHAN H M,YEN K S,RATNAM M M.Crack displacement sensing and measurement in concrete using circular grating Moiré fringes and pattern matching[J].Proc SPIE,2008,7155:715529/1-715529/8.
[14]	PARK Y C,KIM S W.Optical measurement of spindle radial motion by Moiré technique of concentric-circle gratings[J].International Journal of Machine Tools and Manufacture,1994,34(7):1019-1030.
[15]	LATIME P.Talbot plane patterns:grating image or interference effects[J].Appl Opt,1993,32(7):1078-1083.
[16]	XIA H J,FEI Y T.Error analysis of 2-D diffraction grating interferometer for high-resolution displacement measurement[J].Proc SPIE,2008,7130:13052-13055.
[17]	WANG X Z,DONG X H,GUO J,et al.Two-dimensional displacement sensing using a cross diffraction grating scheme[J].Journal of Optics,2004,A6(1):106-111.
[18]	ZHAO B,YAN L,HAO D F.Experimental study about a type of gratings interferometer[J].Chinese Journal of Scientific Instrument,2001,22(1):271-274(in Chinese).
[19]	ZHU M Ch,ZHOU Zh F,ZHANG T.Research of the He-Ne laser-wave interferometer[J].Laser Technology,2004,28(5):531-533(in Chinese).
[20]	LEE J Y,CHEN H Y,HSU C C,et al.Optical heterodyne grating interferometry for displacement measurement with subnanometric resolution[J].Sensors and Actuators,2007,137(1):185-191.
[21]	FERHANOGLU O,TOY M F,UREY H.Two-wavelength grating interferometry for MEMS sensors[J].Photonics Technology,2007,19(21/24):1895-1897.
[22]	WANG F,QI X D.Grating heterodyne interferometer of high accuracy controlling photoelectric grating ruling engine[J].Laser Technology,2008,32(5):474-476(in Chinese).
[23]	QIAO N Sh,ZHAO H J,CAI X H,et al.Study of profilometry based on two-frequency grating[J].Journal of Optoelectronics·Laser,2008,19(1):74-77(in Chinese).
[24]	WANG X H,HE X D,FU Y J.The real-time measurement by two-frequency grating[J].Laser Technology,2007,31(4):384-387(in Chinese).

Development of displacement measurement technologies based on grating interferometry

Abstract

References

Proportional views

通讯作者: 陈斌, bchen63@163.com

Proportional views