[1] GRAWAL P A, DUTTA N K. Semiconductor lasers[M].New York, USA:Van Nostrand Reinhold, 1994:426.
[2] IGA K. Vertical-cavity surface-emitting laser:Its conception and evolution[J]. Japanese Journal of Applied Physics, 2008, 47(1):1-10. doi: 10.1143/JJAP.47.1
[3] GUO T H, WANG Y F, YU G L.Selection and analysis of theoretical model of fiber Bragg grating external cavity laser diode[J]. Laser Technology, 2017, 41(2):225-230(in Chinese).
[4] CHANG-HASNAIN C J, HARBISON J P, ZAH C E, et al. Continuous wavelength tuning of two-electrode vertical cavity surface emitting lasers[J]. Electronics Letters, 1991, 27(11):1002-1003. doi: 10.1049/el:19910624
[5] DU B X. The theory of the semiconductor lasers[M].Beijing:Publishing Company of Weapon Industry, 2001:193(in Chinese).
[6] HAGLUND E P, KUMARI S, WESTBERGH P, et al. Dynamic properties of silicon-integrated short-wavelength hybrid-cavity VCSEL[J]. Proceedings of the SPIE, 2016, 9766:976607. doi: 10.1117/12.2207301
[7] PANAJOTOV K, XIE Y, BEECKMAN J, et al. Hybrid VCSEL-liquid crystal systems[J]. Proceedings of the SPIE, 2015, 9381:93810P. doi: 10.1117/12.2079032
[8] HU J B, LI M P. Design of novel tunable semiconductor lasers in optical fiber communication systems[J]. Laser Technology, 2016, 40(2):280-283(in Chinese).
[9] JAYARAMAN V, COLE G D, ROBERTSON M, et al. High-sweep-rate 1310nm MEMS-VCSEL with 150nm continuous tuning range[J]. Electronics Letters, 2012, 48(14):867-869. doi: 10.1049/el.2012.1552
[10] HUANG M C Y, CHENG K B, ZHOU Y, et al. Monolithic Integrated Piezoelectric MEMS-Tunable VCSEL[J]. IEEE Journal of Selected Topics in Quantum Electronics, 2007, 13(2):374-380. doi: 10.1109/JSTQE.2007.894056
[11] NAKAHAMA M, SANO H, NAKATA N, et al. Electro-thermal tuning of MEMS VCSEL with giant wavelength-temperature dependence[J]. IEICE Electronics Express, 2012, 9(5):416-421. doi: 10.1587/elex.9.416
[12] CASTANY O, DUPONT L, SHUAIB A, et al.Tunable semiconductor vertical-cavity surface-emitting laser with an intracavity liquid crystal layer[J].Applied Physics Letters, 2011, 98(16):161105. doi: 10.1063/1.3569591
[13] VAIL E C, LI G S, YUEN W, et al. High performance micromechanical tunable vertical cavity surface emitting lasers[J]. Electronics Letters, 1996, 32(20):1888-1889. doi: 10.1049/el:19961232
[14] LI M Y, YUEN W, LI G S, et al. High performance continuously tunable top-emitting vertical cavity laser with 20nm wavelength range[J]. Electronics Letters, 1997, 33(21):1051-1052.
[15] CHANG-HASNAIN C J. Tunable VCSEL[J]. IEEE Journal of Selected Topics in Quantum Electronics, 2000, 6(6):978-987. doi: 10.1109/2944.902146
[16] LI M Y, YUEN W, LI G S, et al. Top-emitting micromechanical VCSEL with a 31.6nm tuning range[J]. IEEE Photonics Technolo-gy Letters, 1998, 10(1):18-20. doi: 10.1109/68.651087
[17] HUANG M C Y, CHENG K B, ZHOU Y, et al. Demonstration of piezoelectric actuated gaas-based MEMS tunable VCSEL[J]. IEEE Photonics Technology Letters, 2006, 18(10):1197-1199. doi: 10.1109/LPT.2006.873923
[18] SUGIHWO F, LARSON M C, HARRIS J S. Low threshold continuously tunable vertical-cavitysurface-emitting lasers with 19.1nm wavelength range[J]. Applied Physics Letters, 1997, 70(5):547-549. doi: 10.1063/1.119264
[19] GUAN B L, ZHANG J L, REN X J, et al. Micro-nano-optical machine system tunable wavelength vertical cavity surface emitting lasers with wide tunable range[J]. Acta Physica Sinica, 2011, 60(3):262-265(in Chinese).
[20] TAYEBATI P, WANG P D, VAKHSHOORI D, et al. Half-symmetric cavity tunable microelectro echanical VCSEL with single spatial mode[J].IEEE Photonics Technology Letters, 1998, 10(12):1679-1681. doi: 10.1109/68.730467
[21] RIEMENSCHNEIDERA F, SAGNESB I, BOHM G, et al. A new concept for tunable long wavelength VCSEL[J]. Optics Communications, 2003, 222(1/6):341-350.
[22] RIEMENSCHNEIDER F, MAUTE M, HALBRITTER H, et al. Continuously tunable long-wavelength MEMS-VCSEL with over 40-nm tuning range[J]. IEEE Photonics Technology Letters, 2004, 16(10):2212-2214. doi: 10.1109/LPT.2004.833885
[23] GIERL C, GRUENDL T, DEBERNARDI P, et al. Surface micromachined tunable 1.55μm-VCSEL with 102nm continuous single-mode tuning[J]. Optics Express, 2011, 19(18):17336-17343. doi: 10.1364/OE.19.017336
[24] LEVALLOIS C, CAILLAUD B. Nano-polymer-dispersed liquid crystal as phase modulator for a tunable vertical-cavity surface-emitting laser at 1.55μm[J]. Applied Optics, 2006, 45(33):8484-8490. doi: 10.1364/AO.45.008484
[25] LEVALLOIS C, CAILLAUD B, DUPONT L, et al. Long-wavelength vertical-cavity surface-emitting laser using an electro-optic index modulator with 10nm tuning range[J]. Appllied Physics Letters, 2006, 89(1):011102. doi: 10.1063/1.2219144
[26] WILKINSON C I, WOOD HEAD J, FROST J E F, et al. Electrical polarization control of vertical-cavity surface emitting lasers using polarized feedback and a liquid crystal[J]. IEEE Photonic Technology Letters, 2002, 11(2):155-157.
[27] XIE Y, BEECKMAN J, WOESTENBORGHS W, et al.VCSEL with photo-aligned liquid crystal overlay[J]. IEEE Photonics Technology Letters, 2012, 24(17):1509-1512. doi: 10.1109/LPT.2012.2207431
[28] XIE Y, BEECKMAN J, PANAJOTOV K, et al. Vertical-cavity surface-emitting laser with a chiral nematic liquid crystal overlay[J]. IEEE Photonics Journal, 2014, 6(1):1-10.
[29] BELMONTE C, FRASUNKIEWICZ L, CZYSZANOWSKI T, et al. Optimization of electrically tunable VCSEL with intracavity nematic liquid crystal[J]. Optics Express, 2015, 23(12):15706. doi: 10.1364/OE.23.015706
[30] WANG H X, CHEN J D, CHANG T Y, et al. Research of modulation characteristics of distributed feedback laser[J]. Laser Technology, 2017, 41(6):836-840(in Chinese).