| [1] | GUO X G, ZHAI Ch H, ZHANG L, et al. Nano glass processing performance of optical quartz glass[J]. Optical Precision Engineering, 2014, 11(11):2959-2966(in Chinese). |
| [2] | ZHAI L B, ZHAO H L, CHEN J M. Three frequency laser micromachining of glass groove[J]. Applied Laser, 2006, 26(6):365-368(in Chinese). |
| [3] | LIANG D Zh, WANG M, DU Ch L, et al. Research on microchannel of silica glass fabricated by laser-induced backside wet etching[J]. Laser Technology, 2017, 41(4):174-177(in Chinese). |
| [4] | QIN Sh F, YUAN F, JIANG A R. Research on laser cutting technique of quartz pendulum[J]. Navigation, Positioning and Timing, 2015, 2(3):102-106(in Chinese). |
| [5] | BENDERLY D. Laser allows single-step marking on automotive glass[J]. Industrial Laser Solution, 2016, 31(3):12-15. |
| [6] | YAN G Sh, ZHU J G, HUANG Y L, et al. Fabrication of micro-scale gratings for moire method with a femtosecond laser[J]. Theoretical and Applied Mechanics Letters, 2016, 6(4):171-175. doi: 10.1016/j.taml.2016.06.001 |
| [7] | DAI Y T, XU G, CUI J L. 3-D micro ablation technique of transparent materials using deep ultraviolet laser[J]. Applied Laser, 2009, 29(5):411-414(in Chinese). |
| [8] | IHLEMANN J. Nanosecond and femtosecond excimer laser ablation of fused silica[J]. Applied Physics, 1992, A54(4):363-368. |
| [9] | IHLEMANN J. UV-laser ablation of fused silica mediated by solid coating absorption[J]. Proceedings of the SPIE, 2007, 6458:701140. |
| [10] | ZHANG J. SVGIDKA K, TAKAHASHI T, et al. Dual-beam ablation of fuse silica by multiwavelength excitation process using KrF excimer and F2 lasers[J].Applied Physics, 2000, A71(1):23-26. |
| [11] | WANG S. A study on laser etching and polishing quartz glasses technology[D]. Wuhan: Huazhong University of Science & Technology, 2012: 33-34(in Chinese). |
| [12] | PIERREL L, MARTIN E, KLAUS Z. Laser-induced front side etching of fused silica with KrF excimer laser using thin chromium lasers[J]. Applications and Material Science, 2012, 209(6):1114-1118. |
| [13] | HAMDANI A H, ANSAR A, AKHTER R, et al. Laser induced backside dry etching of BK-7 and quartz in vacuum[J]. Key Engineering Materials, 2012, 261(510):261-264. |
| [14] | TSVETKOV M Y, YUSUPOV V L, MINAEV N V, et al. On the mechanisms of single-pulse laser-induced backside wet etching[J]. Optics and Laser Technology, 2017, 88:17-23. doi: 10.1016/j.optlastec.2016.05.020 |
| [15] | ZIMMER K, BHME R, RUTHE D, et al. Backside laser etching of fused silica using liquid gallium[J]. Applied Physics, 2006, A84(4):455-458. |