[1] CHAI H L, YAN X L, WANG S M, et al. Advances in femtosecond laser fabrication of microchannels[J].Transactions of Beijing Institute of Technology, 2012, 32(10):991-1003(in Chinese).
[2] DENG Z F, YANG Q, CHEN F, et al. Fabrication of large-area concave microlens array on silicon by femtosecond laser micromachining[J].Optics Letters, 2015, 40(6):1928-1931.
[3] PECHOLT B, GUPTA S, MOLIAN P. Review of laser microscale processing of silicon carbide[J]. Journal of Laser Applications, 2011, 23(1):012008. doi: 10.2351/1.3562522
[4] PSALTIS D, QUAKE S R, YANG C H. Developing optofluidic technology through the fusion of microfluidics and optics[J]. Nature, 2006, 442(7101):381-386. doi: 10.1038/nature05060
[5] LIAO Y, JU Y F, ZHANG L, et al. Three-dimensional microfluidic channel with arbitrary length and configuration fabricated inside glass by femtosecond laser direct writing[J]. Optics Letters, 2010, 35(19):3225-3227. doi: 10.1364/OL.35.003225
[6] JIANG L, LIU P J, YAN X L, et al.High-throughput rear-surface drilling of microchannels in glass based on electron dynamics control using femtosecond pulse trains[J]. Optics Letters, 2012, 37(14):2781-2783. doi: 10.1364/OL.37.002781
[7] WANG J, NIINO H, YABE A. One-step microfabrication of fused silica by laser ablation of an organic solution[J]. Applied Physics, 1998, A68(1):111-113.
[8] BÖHME R, BRAUN A, ZIMMER K. Backside etching of UV-transparent materials at the interface to liquids[J]. Applied Surface Science, 2002, 186(1):276-281.
[9] VASS C, SEBÖK D, HOPP B. Comparing study of subpicosecond and nanosecond wet etching of fused silica[J]. Applied Surface Science, 2006, 252(13):4768-4772. doi: 10.1016/j.apsusc.2005.07.118
[10] KAWAGUCHI Y, NIINO H, SATO T, et al. A deep micro-trench on silica glass fabricated by laserinduced backside wet etching (LIBWE)[J].Journal of Physics Conference Series, 2007, 59(59):380-383.
[11] CHEN F, YANG Q, BIAN H, et al. Micro-nano fabrication of femtosecond laser wet etch[J].Journal of Applied Optics, 2014, 35(1):150-154(in Chinese).
[12] YUN Zh Q, WEI R Sh, LI W, et al. Sub-diffraction-limit fabrication of 6H-SiC with femtosecond laser[J].Acta Physica Sinica, 2013, 62(6):068101(in Chinese).
[13] YAO L Y. Mechanism and morphology of silica glass by femtosecond laser ablation[D].Dalian: Dalian University of Technology, 2014: 38-41(in Chinese).