[1] |
MELVILLE W S.The use of saturable reactor as discharge devices for pulse generators[J].Proceedings of IEEE, 1951, 98(53):185-205. |
[2] |
SMILANSKI I, BYRON S R, BURKES T R. Electrical excitation of a XeCl laser using magnetic pulse-compression[J]. Applied Physics Letter,1982, 40(7): 547-548. |
[3] |
TANAKA H, OBARA M. An all solid-state magnetic pulse compressor with amorphous metals for pumping a repetition-rated KrF excimer laser[J]. Review of Scientific Instruments, 1990, 61(4): 1196-1199. |
[4] |
SHIMADA T, OBARA M, NOGUCHI A.An all solid-state magnetic switching exciter for pumping excimer lasers[J]. Review of Scientific Instruments, 1985, 56(11): 2018-2020. |
[5] |
HATANAKA H, OBARA M.High-efficiency operation of the high-repetition-rate all-solid-state magnetic pulse compressor for KrF excimer lasers[J]. Measurement Science & Technology,1991, 2(1): 42-48. |
[6] |
WILLIM P, RICK S, IGPR F, et al.A low cost of ownership KrF excimer light source using a novel pulse power and chamber confi-guration[J]Proceedings of SPIE, 1995,2440:90-100. |
[7] |
NESS R, MELCHER P, FERGUSON G, et al. A decade of solid state pulsed power development at cymer INC[C]//2004 IEEE International Power Modulator and High Voltage Conference.San Diego,USA:IEEE,2004:228-233.. |
[8] |
BARRETT D M.Core reset consideration in magnetic pulse compression networks[C]//The Tenth IEEE International Pulsed Power Conference.Albuqueque,New Mexico,USA:IEEE,1995:1160-1165. |
[9] |
YOU L B.Design and experimental study of all solid state pulse power module for excimer lasers[J]. High Power Laser and Particle Beams, 2009, 21(11):1750-1751(in Chinese). |
[10] |
ZHAO J M, GAO J, LIANG X, et al. Study on the pulse charge power for a dual-chamber excimer laser[J].Laser Technology,2013, 37(1):97-100(in Chinese). |