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基于光学偏振法的直线度误差测量

Straightness error measurement based on optical polarization method

  • 摘要: 为了发展微小角度和直线度误差的测量技术,采用了一种基于光偏振性的直线度误差测量方法。理论推导了由激光斑点侧移量解算角度量的关系式,构建了虚拟仿真系统,考察了该方法的可行性;基于虚拟仿真和软件建模,以一根长度1 m、表面呈现出良好线性特征、符合预期几何精度要求的导轨为对象进行了实验验证,并与自准直仪方法进行了比较。结果表明,该方法和自准直仪测得小角度的正切值在±1.5×10−4范围内吻合得很好。该研究对微小角度和直线度误差的测量是有帮助的。

     

    Abstract: In order to develop the measurement technology of small angle and straightness errors, a method of straightness error measurement based on light polarization was proposed. The relation of angle quantity computed by laser speck lateral shift was theoretically derived. Virtual simulation system was constructed, and the feasibility of the proposed method was investigated. Based on the virtual simulation and software modeling, the experimental verification was conducted on a guide rail with the length of 1 m, good linear characteristics and the expected geometric accuracy requirements. The method was compared with autocollimator method. The results show that, the proposed method is in good agreement with the tangent value of small angle measured by the autocollimator in the range of ±1.5×10−4. The study is helpful for the measurement of small angle and straightness error.

     

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