[1] ABBASI F, MIRZADEH H, KATBAB A. Modification of polysiloxane polymers for biomedical applications: A review[J]. Polymer International, 2001, 50(12): 1279-1287. doi: 10.1002/pi.783
[2] KANT M B, SHINDE S D, BODAS D, et al. Surface studies on benzophenone doped PDMS microstructures fabricated using KrF excimer laser direct write lithography[J]. Applied Surface Science, 2014, 314(30): 292-300.
[3] AMID S, SHADMAN K, TOHID F D. Conventional and emerging strategies for the fabrication and functionalization of PDMS-based microfluidic devices[J]. Lab on a Chip, 2021, 21(16): 3053-3075. doi: 10.1039/D1LC00288K
[4] 陈锐, 王锦成, 章文卓, 等. 微结构传感器的激光制造技术研究进展[J]. 光电工程, 2023, 50(3): 220041.CHEN R, WANG J Ch, ZHANG W Zh, et al. Research progress of laser manufacturing technology for microstructure sensor[J]. Opto-Electronic Engineering, 2023, 50(3): 220041(in Chinese).
[5] GAO K P, LI G, LIAO L N, et al. Fabrication of flexible microelectrode arrays integrated with microfluidic channels for stable neural interfaces[J]. Sensors and Actuators, 2013, A197(1): 9-14.
[6] ABDULHUSSEIN A T, KANNARPDDY G K, WRIGHT A B, et al. Current trend in fabrication of complex morphologically tunable superhydrophobic nano scale surfaces[J]. Applied Surface Science, 2016, 384(30): 311-332.
[7] LIU Y Sh, ZHANG P, DENG Y B, et al. Polymeric microlens array fabricated with PDMS mold-based hot embossing[J]. Journal of Micromechanics and Microengineering, 2014, 24(9): 095028. doi: 10.1088/0960-1317/24/9/095028
[8] DENG Y, HONG W Sh, HE J F, et al. Micro-cracks on crosslinked poly (dimethylsiloxane) (PDMS) surface treated by nanosecond laser irradiation[J]. Applied Surface Science, 2018, 445(1): 488-495.
[9] 顾江, 叶霞, 范振敏, 等. 激光刻蚀法制备仿生超疏水表面的研究进展[J]. 激光技术, 2019, 43(4): 493-499.GU J, YE X, FAN Zh M, et al. Progress in fabrication of biomimetic superhydrophobic surfaces by laser etching[J]. Laser Technology, 2019, 43(4): 493-499(in Chinese).
[10] YAN Zh B, HUANG X Y, YANG Ch. Rapid prototyping of single-layer microfluidic PDMS devices with abrupt depth variations under non-clean-room conditions by using laser ablation and UV-curable polymer[J]. Microfluidics and Nanofluidics, 2017, 21(6): 108. doi: 10.1007/s10404-017-1943-2
[11] HOHNHOLZ A, OBATA K, NAKAJIMA Y, et al. Hybrid UV laser direct writing of UV-curable PDMS thin film using aerosol jet printing[J]. Applied Physics, 2019, A125(2): 120-125.
[12] 谢凯武, 李泽斌, 邓宇, 等. 聚二甲基硅氧烷柔性基材上应力-激光复合制备直角微沟槽[J]. 高分子材料科学与工程, 2022, 38(3): 106-112.XIE K W, LI Z B, DENG Y, et al. Stress-laser composite fabrication of right-angle microgrooves on polydimethylsiloxane flexible substrate[J]. Polymer Materials Science and Engineering, 2022, 38(3): 106-112(in Chinese).
[13] CHEUNG K C. Implantable microscale neural interfaces[J]. Biomedical Microdevices, 2007, 9(6): 923-938. doi: 10.1007/s10544-006-9045-z
[14] 齐立涛, 刘亚升, 樊爱春, 等. 盖板辅助紫外固体激光打孔的实验研究[J]. 黑龙江科技大学学报, 2020, 30(1): 100-104.QI L T, LIU Y Sh, FAN A Ch, et al. Experimental study on ultraviolet solid laser drilling assisted by cover plate[J]. Journal of Heilongjiang University of Science & Technology, 2020, 30(1): 100-104(in Chinese).
[15] HA K H, LEE S W, KIM J G, et al. Fabrication of a micro-hole array on metal foil by nanosecond pulsed laser beam machining using a cover plate[J]. Journal of Micromechanics and Microengineering, 2015, 25(2): 027001. doi: 10.1088/0960-1317/25/2/027001
[16] 张全利, 储成龙, 翟健超, 等. 紫外纳秒脉冲激光烧蚀单晶硅表面特征创成机制[J]. 航空学报, 2022, 43(4): 515-527.ZHANG Q L, CHU Ch L, ZHAI J Ch, et al. Surface characteristics formation mechanism of ablated monocrystalline silicon by UV nanosecond pulsed laser[J]. Acta Aeronautica et Astronantica Sinica, 2022, 43(4): 515-527(in Chinese).
[17] WANG M J, ZHANG Y, BIN J X, et al. Cold laser micro-machining of PDMS as an encapsulation layer for soft implantable neural interface[J]. Micromachines, 2022, 13(9): 1484. doi: 10.3390/mi13091484
[18] GRAUBNER V M, NUYKEN O, LIPPERT T, et al. Local chemical transformations in poly (dimethylsiloxane) by irradiation with 248 and 266 nm[J]. Applied Surface Science, 2006, 252(13): 4781-4785. doi: 10.1016/j.apsusc.2005.07.123
[19] LI X X, GUAN Y Ch. Theoretical fundamentals of short pulse laser-metal interaction: A review[J]. Nanotechnology and Precision Engineering, 2020, 3(3): 105-125.
[20] ZHANG X F, YAO Zh Q, HOU Zh B, et al. Processing and profile control of microhole array for PDMS mask with femtosecond laser[J]. Micromachines, 2022, 13(2): 340.