| [1] | NI X W,LU J,HE A Zh.Measurement of laser damaging thesholds of CCD devices[J].Laser Technology,1994,18(3):153-156(in Chinese). |
| [2] | FAN F M,CHENG L L, WANG X F, et al.A new type of high-speed automatic focusing system[J].Opto-Electronic Engineering,2010,37(5):127-132(in Chinese). |
| [3] | WANG G,XU Q,LIU Y,et al.Transient distributions of temperature field and thermal stress field induced by laser irradiation[J].Journal of Applied Optics,2011,32(4):801-805(in Chinese). |
| [4] | YOFFA E J.Role of carrier diffusion in lattice heatig duing pulsed laserannealing[J]. Applied Physics Letters,1980,36(1):37-38. |
| [5] | LIRON Y,PARAN Y,ZATORSKY N G,et al.Laser autofucusing system for high-resolution cell biological imaging[J].Journal of Microscopy,2006,221(2):145-151. |
| [6] | LING J Y,SHU R,HUANG G H,et al. Study on threshold of laser damage to CCD and COMS image sensor[J].Journal of Infrared Millimeter Waves,2008,27(6):475-478(in Chinese). |
| [7] | TANG G Q. Analysis and comparison of several calculation methods of beam spot center[J].Journal of Beijing Institute of Machi-nery,2009,24(1):61-64(in Chinese). |
| [8] | LIU H,FU X Q,HOU Y Ch.Control of high-power laser focal position in nonlinear media[J].Acta Photonica Sinica,2011,40(2):267-271(in Chinese). |
| [9] | SCHWENKS H, NEUSCHAEFER-RUBE U, PFEIFER T, et al. Optical methods for dimensional metrology in prodction engineering[J]. CIRP Annals-Manufacturing Technology,2002,51(2):685-699. |
| [10] | SCHAFFER C B, BRODEUR A, MAZUR E. Laser-induced breakdown and damage in bulk transparent materials induced by tightly focused femtosecond laser pulses[J]. Measurement Science and Technology,2001,12(3): 1784-1794. |