[1] ZHANG B L, HE Zh B, WU W D, et al. Influencing factors study of surface finish of CH coating on microshell[J]. Journal of Sichuan University (Natural Science Edition), 2009, 46(3): 647-651(in Ch-inese).
[2] CHEN G L, GE Y J, ZHANG Y F, et al. Study on the preparation of high barrier hydrogenated carbon film and its properties[J]. Acta Physica Sinica, 2005, 54(2): 818-823(in Chinese). doi: 10.7498/aps.54.818
[3] WU W D, LUO J Sh, HUANG Y, et al. The effect of H2 and H+on CxH1-x film surface state[J]. High Power Laser and Particle Beams, 2000, 12(5): 593-596(in Chinese).
[4] WU Y X, LI H X, JI L, et al. Effect of rotational speeds and mated balls on the vacuum tribological properties of a-C: H film[J]. China Surface Engineering, 2012, 25(6): 90-95(in Chinese).
[5] WANG B F, ZHANG Y K, WANG Zh W, et al. Study on the mechanism and wettability of pmma surface microstructure prepared by femtosecond laser[J]. Laser & Infrared, 2020, 50(9): 1057-1064(in Chinese).
[6] QI L T, LI X, LIU Y Sh. Process and mechanism for sapphire ablation by single-pulse 266nm solid-state laser[J]. Journal of Heilongjiang University of Science and Technology, 2020, 30(4): 416-421(in Chinese).
[7] FU Q, ZHANG F, JIANG M, et al. Study on technology and quality of etching copper clad laminate with 1064nm and 355nm laser[J]. Laser Technology, 2014, 38(4): 435-440(in Chinese).
[8] QI L T. Different wavelength solid-state laser ablation of silicon wafer in vacuum[J]. Chinese Optics, 2014, 7(3): 442-448(in Chin-ese).
[9] ZHANG X C, QIAN J, LIU J, et al. Recent process in laser processing of fiber-reinforced composites[J]. Laser & Optoelectronics Progress, 2020, 57(11): 111432(in Chinese).
[10] TAN C W, SU J H, FENG Z W, et al. Research status and deve-lopment on laser joining of metal to plastic[J]. Journal of Mechanical Engineering, 2020, 56(6): 85-94(in Chinese). doi: 10.3901/JME.2020.06.085
[11] SRINIVASAN R, MAYNEBANTON V. Self-developing photoetching of poly(ethylene terephthalate) films by far-ultraviolet excimer laser radiation[J]. Applied Physics Letters, 1982, 41(6): 576-578. doi: 10.1063/1.93601
[12] SUTCLIFFE E, SRINIVASAN R. Dynamics of UV laser ablation of organic polymer surfaces[J]. Journal of Applied Physics, 1986, 60(9): 3315-3322. doi: 10.1063/1.337698
[13] D'COUTO G C, BABU S V. Heat transfer and material removal in pulsed excimer-laser-induced ablation: Pulsewidth dependence[J]. Journal of Applied Physics, 1994, 76(5): 3052-3058. doi: 10.1063/1.357486
[14] YALUKOVA O, SARADY I. Investigation of interaction mechanisms in laser drilling of thermoplastic and thermoset polymers using diffe-rent wavelengths[J]. Composites Science and Technology, 2007, 66(10): 1289-1296.
[15] WANG J, ZHOU L, FU H T, et al. Experimental study on ultraviolet laser drilling of polystyrene[J]. Electromachining & Mould, 2019, 348(4): 54-57(in Chinese).
[16] WU P, FAN Y R, GUO J W, et al. High reflectivity aluminum film processed by nanosecond pulse laser[J]. Laser Technology, 2019, 43(6): 779-783(in Chinese).
[17] XIE X Zh, HUANG X D, CHEN W F, et al. Study on scribing of sapphire substrate by pulsed green laser irradiation[J]. Chinese Journal of Lasers, 2013, 40(12): 1203010(in Chinese). doi: 10.3788/CJL201340.1203010
[18] GUO M Ch, WANG M D, ZHANG Sh J, et al. Techniques for femtosecond laser processing of micro-holes in FR-4 copper clad laminate[J]. Chinese Journal of Lasers, 2020, 47(12): 1202008(in Chinese). doi: 10.3788/CJL202047.1202008
[19] ZHANG Y J, FANG M G. The research of the ceramic drilling by Nd : YAG laser[J]. Laser & Infrared, 2001, 31(3): 161-162(in Chinese).
[20] CHEN K H, WU W, CHU B H, et al. UV excimer laser drilled high aspect ratio submicron via hole[J]. Applied Surface Science, 2009, 256(1): 183-186. doi: 10.1016/j.apsusc.2009.07.105
[21] SONG Y Q, WEI X, XIE X Zh, et al. The detection analysis methods of photochemical effect in laser processing[J]. Journal of Test and Measurement Technology, 2011, 25(4): 59-63(in Chinese).
[22] ZHANG Q L, CHU Ch L, ZHAI J Ch, et al. Surface characteristics formation mechanism of the ablated monocrystal-line Si by a UV nano-second pulsed laser[J/OL]. (2021-04-29)[2021-09-16]. http://kns.cnki.net/kcms/detail/11.1929.v.20210429.1136.034.html (in Chinese).