| [1] | WEI Ch Y, HE H B, DENG Zh, et al. Study of thermal behaviours in CO2 laser irradiated glass[J]. Optical Engineering, 2005, 44(4):044202. doi: 10.1117/1.1882374 |
| [2] | LI Y. Heat accumulation in high repetition rate femtosecond laser micromachining and its applications[D]. Tianjin: Tianjin University, 2012: 11-31(in Chinese). |
| [3] | LI Sh X, ZHANG Zh P, QIN Sh J, et al. Research on the temperature and thermal stress of fused silica irradiated by a laser pulse[J].Laser & Infrared, 2016, 46(7):786-791(in Chinese). |
| [4] | YU J X, HE Sh B, XIANG X, et al. Simulation on stress control of laser irradiated fused silica on ANSYS[J]. Journal of University of Electronic Science and Technology of China, 2012, 41(6):870-874(in Chinese). |
| [5] | LI X L, NIU Ch H, MA M Y, et al. Finite element simulation of damage characteristics of CCD detectors under single-laser-pulse irradiation[J]. Laser Technology, 2016, 40(5):730-733(in Chinese). |
| [6] | CAI J X, ZHANG Y, WANG D, et al. Numerical simulation study on thermal stress damage in 1064nm anti-reflection fused silica by laser[J]. Journal of Changchun University of Science and Technology (Natural Science Edition), 2014, 37(6):77-81(in Chinese). |
| [7] | JIAO J K, WANG X B. Temperature distribution of moving quartz glass heated by CO2 laser[J]. High Power Laser and Particle Beams, 2007, 19(1):1-4(in Chinese). |
| [8] | JIANG N, NIU Y X, ZHANG Sh L, et al. Numerical simulation of thermal shock effect on germanium induced by out-of-band pulsed-laser[J]. Infrared and Laser Engineering, 2008, 37(3):481-484(in Chinese). |
| [9] | SU L, ZENG X D. Study of thermal deformations of laser windows[J]. Electronic Science and Technology, 2009, 22(4):63-65(in Chinese). |
| [10] | COMSOL. Heat transfer module user's guide[EB/OL]. (2013-11-01)[2017-03-05]. http://www.comsol.com/support/knowledgebase. |
| [11] | COMSOL. Structural mechanics module user's guide[EB/OL]. (2013-11-01)[2017-3-05]. http://www.comsol.com/support/knowledgebase. |
| [12] | GRIGOROPOULOS C P. Transport in laser microfabrication[M].New York, USA:Cambridge University Press, 2009:60-84. |
| [13] | GAO Y H, AN Zh Y, LI L J, et al. Research on beam shaping for high-order gaussian beam[J]. Optics & Optoelectronic Technology, 2011, 9(5):61-64(in Chinese). |
| [14] | QIN S J, LI W J. Micromachining of complex channel systems in 3-D quartz substrates using Q-switched Nd:YAG laser[J]. Applied Physics, 2002, A74(6):773-777. |
| [15] | LI Sh X, BAI Zh Ch, QIN Sh J. Researche on the fabrication of micro channels in fused silica substrates by nanosecond laser[J].Laser & Optoelectronics Progress, 2012, 49(2):041401(in Chinese). |
| [16] | ZHAI L B, ZHAO H L, CHEN J M. The microfabrication of microchannel on glass with frequency tripled Nd:YAG laser[J]. Applied Laser, 2006, 26(6):365-368(in Chinese). |
| [17] | LI Sh X, BAI Zh Ch, HUANG Zh, et al. Study on the machining mechanism of fabrication of micro channels in fused silica substrates by laser-induced plasma[J]. Acta Physica Sinica, 2012, 61(11):115201(in Chinese). |