[1] |
SMEGKAL P,BREADMORE M C,GUIJTR M,et al.Separation of carboxylic acids in human serum by isotachophoresis using acommercial field-deployable analytical platform combined with in-house glass microfluidic chips[J].Analytica Chimica Acta,2012,755(22):115-120. |
[2] |
XU Zh,WEN J K,LIU Ch,et al.Research on forming and application of U-form glass micro-nanofluidic chip with long nanochannels[J].Microfluidics and Nanofluidics,2009,7(3):423-429. |
[3] |
YE J M,WANG X D,ZHUANG J L,et al.Microcontact electrochemical etching technique for rapid fabrication of glass-based microfluidic chips[J].RSC Advances,2013,19(3):6960-6963. |
[4] |
ZHOU J.A coating method of glass microchip for capillary electrophoretic separation and detection of DNA fragments[D].Shenyang:China Medical University,2006:9-25(in Chinese). |
[5] |
LUO Y,LOU Zh F,CHU D N,et al.Fabrication of glass microfluidic chip[J].Nanotechnology and Precision Engineering,2004,2(1):20-23(in Chinese). |
[6] |
LI Sh X,BAI Zh Ch,HUANG Zh,et al.Breakdown model of micro channels fabrication in fused silica substrates by laser-induced plasma[J].LaserInfrared,2011,41(9):969-973(in Chinese). |
[7] |
PENG Ch P.Study on laser machining micro channels on quartz[D].Guiyang:Guizhou University,2007:19-25(in Chinese). |
[8] |
DAI Y T,CUI J L,XU G,et al.Influence of laser parameters on etching performance during 157nm laser micromachining[J].Laser Technology,2011,35(1):36-38(in Chinese). |
[9] |
JIANG Ch,WANG Y Q.Study on machining K9 optical glass with KrFexcimer laser[J].ElectromachiningMould,2003(2):33-35(in Chinese). |
[10] |
LI L.The Research of 248nm excimer laser interaction with threeKinds of inorganic nonmetal optical materials[D].Wuhan:Wuhan University of Technology,2014:39-44(in Chinese). |
[11] |
BASTING D,STAMM U.The development of excimerlaser technology-history and future prospects[J].International Journal of Research in Physical Chemistry and Chemical Physics,2001,215(15):75-99. |
[12] |
LEE S K,YOON K K,WHANG K H,et al.Excimer laser ablation removal of thin chromium films from glass substrates[J].Surface and Coatings Technology,1999,113(1):63-74. |
[13] |
BASTING D,PIPPERT K,STAMM U.History and futureprospects of excimerlasers[J].Proceedings of the SPIE,2002,4426:25-34. |
[14] |
LOU Q H,XU J,FU Sh F,et al.Pulsed gas-discharge lasers[M].Beijing:Science Press,1993:238-293(in Chinese). |
[15] |
ZUO T Ch.Advanced manufacturing 21 century-laser technology and engineering[M].Beijing:Science Press,2007:363-375(in Chin-ese). |