Novel interferometry measurement technique for birefringence crystal thickness

TANG Chao-wei; SHAO Yan-qing; HE Guo-tian; ZHANG Peng; ZHANG Xu-xiang; ZHAO Li-juan; FU Ming-yi

In order to measure the crystal thickness accurately,a measurement method based on the birefringence characteristics of crystal was proposed and the feasibility was analyzed.Furthermore the realization process of measuring system and arithmetic of calculating thickness was validated by experiments.The experiment result shows that the root mean square of measuring error was less than 20nm.

1. College of Communication Engineering, Chongqing University, Chongqing 400030, China;

2. College of Physics & Information, Chongqing Normal University, Chongqing 400030, China;

3. College of Physics, Southwest University, Chongqing 400715, China

Received Date: 2007-07-16

Accepted Date: 2007-10-25

Available Online: 2008-10-25

Abstract: In order to measure the crystal thickness accurately,a measurement method based on the birefringence characteristics of crystal was proposed and the feasibility was analyzed.Furthermore the realization process of measuring system and arithmetic of calculating thickness was validated by experiments.The experiment result shows that the root mean square of measuring error was less than 20nm.

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Reference (11)

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Novel interferometry measurement technique for birefringence crystal thickness

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References

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