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Volume 19 Issue 5
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Theoretical analysis for deposition of HTSC films over large area by laser scanning ablation

  • 1.

    National Laboratory of Laser Technology, HUST

  • A method, laser scanning ablation,for deposition of well-distributed high Tc supercon-ductivity(HTSC)films over large area was presented,and a mathemathtical model for the method was established.By means of mathmatics analysis,it was shown that the distribution of film thickness depended on the laser scanning radius and the distance between substrate and target.Also indicated by the analysis results,there was an optimum scanning radius for achieving a maximum film in the range of requisite uniforinity. And the results were agreed with experiments.
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    Davis M F, Wosik J, Forster K et al.J A P, 1991;69(10):7182
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    Foltyn S R, Muenchausen R E, Dye R C et al. A P I.1991;59(11):1374
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    Sejjadi A, Lau K K, Saba F et al. Appl Surf Sci, 1990;46(1):86
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    Song W D. An C W, Lu D S et al.API,1993;63(24):3370
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    Venkateean T, Wu X D, Inam A et al.APL1988;52(14):1193
    [6] 安承武.宋文栋.陆冬生,et al.低温物理学报.1993;(15)(增):323
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通讯作者: 陈斌, bchen63@163.com
  • 1. 

    沈阳化工大学材料科学与工程学院 沈阳 110142

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Theoretical analysis for deposition of HTSC films over large area by laser scanning ablation

  • 1. National Laboratory of Laser Technology, HUST
  • Available Online: 1995-09-25

Abstract: A method, laser scanning ablation,for deposition of well-distributed high Tc supercon-ductivity(HTSC)films over large area was presented,and a mathemathtical model for the method was established.By means of mathmatics analysis,it was shown that the distribution of film thickness depended on the laser scanning radius and the distance between substrate and target.Also indicated by the analysis results,there was an optimum scanning radius for achieving a maximum film in the range of requisite uniforinity. And the results were agreed with experiments.

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